Fluorescence microscopy for quality control in nanoimprint lithography

Ch. Finder (Corresponding Author), S. Zankovych, I Maximov, F. Reuther, E.L. Sarwe, J. Seekamp, K. Pfeiffer, P. Carlberg, M. Beck, Jouni Ahopelto, C.M. Sotomayor Torres, L. Montelius, C. Mayer

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