Formation of CoSi on Polycrystalline Silicon by RTA

Gyözö Drozdy, Hannu Ronkainen, Ilkka Suni

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publication14th Nordic Semiconductor Meeting
    EditorsOle Hansen
    Place of PublicationLyngby
    PublisherTechnical University of Denmark (DTU)
    Pages198-201
    ISBN (Print)978-87-8754-832-8, 978-87-9835-460-4
    Publication statusPublished - 1990
    MoE publication typeA4 Article in a conference publication
    Event14th Nordic Semiconductor Meeting - Århus, Denmark
    Duration: 17 Jun 199020 Jun 1990

    Seminar

    Seminar14th Nordic Semiconductor Meeting
    CountryDenmark
    CityÅrhus
    Period17/06/9020/06/90

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