Formation of gaseous intermediates in titanium (IV) chloride plasma oxidation

B. Karlemo; Pertti Koukkari; J. Paloniemi

doi:10.1007/BF01465217

Formation of gaseous intermediates in titanium (IV) chloride plasma oxidation

B. Karlemo, Pertti Koukkari, J. Paloniemi

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Abstract

A number of experiments were made to study tire gas phase reactions that precede TiO₂aerosol formation from TiCl₄ in an O₂/Ar plasma. The gaseous .species from the plasma-aerosol reactor were detected by a high-resolution QP mass spectrometer. The feed ratio of Ar: O₂: TiCl₄ was typically 4. l: 0.1. Under such conditions both titanium oxychlorides and oxides of chlorine could be recognized. In the reactor the decay of oxychlorides from the reactions it-as fast, compared to the decay of chlorine. A rough estimate of the quantities of both ClO(g) and Ti0Cl_x(g) metastable species present is given. TiCl₄ oxidation reaction mechanisms with mentioned oxychlorides as intermediates are discussed The theoretical calculations were conducted in tire temperature range from 800 to 3500°C.

Original language	English
Pages (from-to)	59-77
Number of pages	19
Journal	Plasma Chemistry and Plasma Processing
Volume	16
Issue number	1
DOIs	https://doi.org/10.1007/BF01465217
Publication status	Published - 1996
MoE publication type	A1 Journal article-refereed

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title = "Formation of gaseous intermediates in titanium (IV) chloride plasma oxidation",

abstract = "A number of experiments were made to study tire gas phase reactions that precede TiO2 aerosol formation from TiCl4 in an O2/Ar plasma. The gaseous .species from the plasma-aerosol reactor were detected by a high-resolution QP mass spectrometer. The feed ratio of Ar: O2: TiCl4 was typically 4. l: 0.1. Under such conditions both titanium oxychlorides and oxides of chlorine could be recognized. In the reactor the decay of oxychlorides from the reactions it-as fast, compared to the decay of chlorine. A rough estimate of the quantities of both ClO(g) and Ti0Clx(g) metastable species present is given. TiCl4 oxidation reaction mechanisms with mentioned oxychlorides as intermediates are discussed The theoretical calculations were conducted in tire temperature range from 800 to 3500°C.",

author = "B. Karlemo and Pertti Koukkari and J. Paloniemi",

note = "Project code: K5Su00428",

year = "1996",

doi = "10.1007/BF01465217",

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journal = "Plasma Chemistry and Plasma Processing",

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T1 - Formation of gaseous intermediates in titanium (IV) chloride plasma oxidation

AU - Karlemo, B.

AU - Koukkari, Pertti

AU - Paloniemi, J.

N1 - Project code: K5Su00428

PY - 1996

Y1 - 1996

N2 - A number of experiments were made to study tire gas phase reactions that precede TiO2 aerosol formation from TiCl4 in an O2/Ar plasma. The gaseous .species from the plasma-aerosol reactor were detected by a high-resolution QP mass spectrometer. The feed ratio of Ar: O2: TiCl4 was typically 4. l: 0.1. Under such conditions both titanium oxychlorides and oxides of chlorine could be recognized. In the reactor the decay of oxychlorides from the reactions it-as fast, compared to the decay of chlorine. A rough estimate of the quantities of both ClO(g) and Ti0Clx(g) metastable species present is given. TiCl4 oxidation reaction mechanisms with mentioned oxychlorides as intermediates are discussed The theoretical calculations were conducted in tire temperature range from 800 to 3500°C.

AB - A number of experiments were made to study tire gas phase reactions that precede TiO2 aerosol formation from TiCl4 in an O2/Ar plasma. The gaseous .species from the plasma-aerosol reactor were detected by a high-resolution QP mass spectrometer. The feed ratio of Ar: O2: TiCl4 was typically 4. l: 0.1. Under such conditions both titanium oxychlorides and oxides of chlorine could be recognized. In the reactor the decay of oxychlorides from the reactions it-as fast, compared to the decay of chlorine. A rough estimate of the quantities of both ClO(g) and Ti0Clx(g) metastable species present is given. TiCl4 oxidation reaction mechanisms with mentioned oxychlorides as intermediates are discussed The theoretical calculations were conducted in tire temperature range from 800 to 3500°C.

U2 - 10.1007/BF01465217

DO - 10.1007/BF01465217

M3 - Article

SN - 0272-4324

VL - 16

SP - 59

EP - 77

JO - Plasma Chemistry and Plasma Processing

JF - Plasma Chemistry and Plasma Processing

IS - 1

ER -

Formation of gaseous intermediates in titanium (IV) chloride plasma oxidation

Abstract

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