Fracture properties of atomic layer deposited aluminum oxide free-standing membranes

Maria Berdova (Corresponding Author), Oili M.E. Ylivaara, Ville Rontu, Pekka T. Törmä, Riikka L. Puurunen, Sami Franssila

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)

Abstract

The fracture strength of Al2O3 membranes deposited by atomic layer deposition at 110, 150, 200, and 300°C was investigated. The fracture strength was found to be in the range of 2.25-3.00GPa using Weibull statistics and nearly constant as a function of deposition temperature. This strength is superior to common microelectromechanical systems materials such as diamondlike carbon, SiO2, or SiC. As-deposited membranes sustained high cycling pressure loads >10 bar/s without fracture. Films featured, however, significant reduction in the resistance to failure after annealing (800°C) or high humidity (95%, 60°C) treatments
Original languageEnglish
Article number01A106
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume33
Issue number1
Early online date25 Aug 2014
DOIs
Publication statusPublished - 2015
MoE publication typeA1 Journal article-refereed

Fingerprint

Aluminum Oxide
fracture strength
Fracture toughness
aluminum oxides
membranes
Membranes
Aluminum
Oxides
Atomic layer deposition
atomic layer epitaxy
microelectromechanical systems
MEMS
humidity
Atmospheric humidity
Carbon
Statistics
statistics
Annealing
cycles
annealing

Keywords

  • atomic layer deposition
  • ALD
  • A12O3
  • aluminum oxide
  • fracture strength

Cite this

Berdova, Maria ; Ylivaara, Oili M.E. ; Rontu, Ville ; Törmä, Pekka T. ; Puurunen, Riikka L. ; Franssila, Sami. / Fracture properties of atomic layer deposited aluminum oxide free-standing membranes. In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2015 ; Vol. 33, No. 1.
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Fracture properties of atomic layer deposited aluminum oxide free-standing membranes. / Berdova, Maria (Corresponding Author); Ylivaara, Oili M.E.; Rontu, Ville; Törmä, Pekka T.; Puurunen, Riikka L.; Franssila, Sami.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 33, No. 1, 01A106, 2015.

Research output: Contribution to journalArticleScientificpeer-review

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AU - Berdova, Maria

AU - Ylivaara, Oili M.E.

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AU - Puurunen, Riikka L.

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