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Fracture properties of atomic layer deposited aluminum oxide free-standing membranes
Maria Berdova*, Oili M.E. Ylivaara, Ville Rontu, Pekka T. Törmä, Riikka L. Puurunen, Sami Franssila
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review
16
Citations
(Scopus)