Abstract
We present an experimental study of the frequency scaling of the main, square-extensional mode in a piezoelectrically actuated plate resonator. The studied set consists of resonators of different plate sizes with identical anchors. The behavior of the square-extensional mode is analyzed using electrical impedance measurements and optical characterization of the mechanical vibration fields. The results reveal a detrimental anchor effect, where for certain plate sizes the square-extensional mode branch is split into two due to a coupled oscillation of the resonator plate and the anchors.
| Original language | English |
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| Article number | 013503 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 100 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2012 |
| MoE publication type | A1 Journal article-refereed |