Frequency splitting of the main mode in a microelectromechanical resonator due to coupling with an anchor resonance

Lauri Lipiäinen (Corresponding Author), Antti Jaakkola, Kimmo Kokkonen, Matti Kaivola

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)

Abstract

We present an experimental study of the frequency scaling of the main, square-extensional mode in a piezoelectrically actuated plate resonator. The studied set consists of resonators of different plate sizes with identical anchors. The behavior of the square-extensional mode is analyzed using electrical impedance measurements and optical characterization of the mechanical vibration fields. The results reveal a detrimental anchor effect, where for certain plate sizes the square-extensional mode branch is split into two due to a coupled oscillation of the resonator plate and the anchors.
Original languageEnglish
Article number013503
Number of pages3
JournalApplied Physics Letters
Volume100
Issue number1
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

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