Frequency splitting of the main mode in a microelectromechanical resonator due to coupling with an anchor resonance

Lauri Lipiäinen; Antti Jaakkola; Kimmo Kokkonen; Matti Kaivola

doi:10.1063/1.3673558

Frequency splitting of the main mode in a microelectromechanical resonator due to coupling with an anchor resonance

Lauri Lipiäinen^*
, Antti Jaakkola
, Kimmo Kokkonen
, Matti Kaivola

^*Corresponding author for this work

VTT Technical Research Centre of Finland

Research output: Contribution to journal › Article › Scientific › peer-review

5 Citations (Scopus)

Abstract

We present an experimental study of the frequency scaling of the main, square-extensional mode in a piezoelectrically actuated plate resonator. The studied set consists of resonators of different plate sizes with identical anchors. The behavior of the square-extensional mode is analyzed using electrical impedance measurements and optical characterization of the mechanical vibration fields. The results reveal a detrimental anchor effect, where for certain plate sizes the square-extensional mode branch is split into two due to a coupled oscillation of the resonator plate and the anchors.

Original language	English
Article number	013503
Number of pages	3
Journal	Applied Physics Letters
Volume	100
Issue number	1
DOIs	https://doi.org/10.1063/1.3673558
Publication status	Published - 2012
MoE publication type	A1 Journal article-refereed

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10.1063/1.3673558

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title = "Frequency splitting of the main mode in a microelectromechanical resonator due to coupling with an anchor resonance",

abstract = "We present an experimental study of the frequency scaling of the main, square-extensional mode in a piezoelectrically actuated plate resonator. The studied set consists of resonators of different plate sizes with identical anchors. The behavior of the square-extensional mode is analyzed using electrical impedance measurements and optical characterization of the mechanical vibration fields. The results reveal a detrimental anchor effect, where for certain plate sizes the square-extensional mode branch is split into two due to a coupled oscillation of the resonator plate and the anchors.",

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year = "2012",

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T1 - Frequency splitting of the main mode in a microelectromechanical resonator due to coupling with an anchor resonance

AU - Lipiäinen, Lauri

AU - Jaakkola, Antti

AU - Kokkonen, Kimmo

AU - Kaivola, Matti

PY - 2012

Y1 - 2012

N2 - We present an experimental study of the frequency scaling of the main, square-extensional mode in a piezoelectrically actuated plate resonator. The studied set consists of resonators of different plate sizes with identical anchors. The behavior of the square-extensional mode is analyzed using electrical impedance measurements and optical characterization of the mechanical vibration fields. The results reveal a detrimental anchor effect, where for certain plate sizes the square-extensional mode branch is split into two due to a coupled oscillation of the resonator plate and the anchors.

AB - We present an experimental study of the frequency scaling of the main, square-extensional mode in a piezoelectrically actuated plate resonator. The studied set consists of resonators of different plate sizes with identical anchors. The behavior of the square-extensional mode is analyzed using electrical impedance measurements and optical characterization of the mechanical vibration fields. The results reveal a detrimental anchor effect, where for certain plate sizes the square-extensional mode branch is split into two due to a coupled oscillation of the resonator plate and the anchors.

U2 - 10.1063/1.3673558

DO - 10.1063/1.3673558

M3 - Article

SN - 0003-6951

VL - 100

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 1

M1 - 013503

ER -

Frequency splitting of the main mode in a microelectromechanical resonator due to coupling with an anchor resonance

Abstract

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