Fully integrated FBAR sensor matrix for mass detection

Kari Tukkiniemi; Arto Rantala; M. Nirschl; D. Pitzer; T. Huber; M. Schreiter

doi:10.1016/j.proche.2009.07.262

Fully integrated FBAR sensor matrix for mass detection

Kari Tukkiniemi, Arto Rantala, M. Nirschl, D. Pitzer, T. Huber, M. Schreiter

Siemens AG

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

17 Citations (Scopus)

Original language	English
Title of host publication	Proceedings of the Eurosensors XXIII conference
Publisher	Springer
Pages	1051-1054
DOIs	https://doi.org/10.1016/j.proche.2009.07.262
Publication status	Published - 2009
MoE publication type	A4 Article in a conference publication
Event	23rd Conference EUROSENSORS 2009 - Lausanne, Switzerland Duration: 6 Sept 2009 → 9 Sept 2009

Publication series

Series	Procedia Chemistry
Number	1
Volume	1
ISSN	1876-6196

Conference

Conference	23rd Conference EUROSENSORS 2009
Abbreviated title	Eurosensors XXIII
Country/Territory	Switzerland
City	Lausanne
Period	6/09/09 → 9/09/09

Keywords

FBAR
full integrated
mass sensor matrix;
CMOS
bioelectronics

Access to Document

10.1016/j.proche.2009.07.262

Cite this

@inproceedings{212391486c3148688d260e184cb648c7,

title = "Fully integrated FBAR sensor matrix for mass detection",

keywords = "FBAR, full integrated, mass sensor matrix;, CMOS, bioelectronics",

author = "Kari Tukkiniemi and Arto Rantala and M. Nirschl and D. Pitzer and T. Huber and M. Schreiter",

year = "2009",

doi = "10.1016/j.proche.2009.07.262",

language = "English",

series = "Procedia Chemistry",

publisher = "Springer",

number = "1",

pages = "1051--1054",

booktitle = "Proceedings of the Eurosensors XXIII conference",

address = "Germany",

note = "23rd Conference EUROSENSORS 2009, Eurosensors XXIII ; Conference date: 06-09-2009 Through 09-09-2009",

}

TY - GEN

T1 - Fully integrated FBAR sensor matrix for mass detection

AU - Tukkiniemi, Kari

AU - Rantala, Arto

AU - Nirschl, M.

AU - Pitzer, D.

AU - Huber, T.

AU - Schreiter, M.

PY - 2009

Y1 - 2009

KW - FBAR

KW - full integrated

KW - mass sensor matrix;

KW - CMOS

KW - bioelectronics

U2 - 10.1016/j.proche.2009.07.262

DO - 10.1016/j.proche.2009.07.262

M3 - Conference article in proceedings

T3 - Procedia Chemistry

SP - 1051

EP - 1054

BT - Proceedings of the Eurosensors XXIII conference

PB - Springer

T2 - 23rd Conference EUROSENSORS 2009

Y2 - 6 September 2009 through 9 September 2009

ER -