Fully integrated FBAR sensor matrix for mass detection

Kari Tukkiniemi, Arto Rantala, M. Nirschl, D. Pitzer, T. Huber, M. Schreiter

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    23 Citations (Scopus)
    Original languageEnglish
    Title of host publicationProceedings of the Eurosensors XXIII conference
    PublisherSpringer
    Pages1051-1054
    DOIs
    Publication statusPublished - 2009
    MoE publication typeA4 Article in a conference publication
    Event23rd Conference EUROSENSORS 2009 - Lausanne, Switzerland
    Duration: 6 Sep 20099 Sep 2009

    Publication series

    SeriesProcedia Chemistry
    Number1
    Volume1
    ISSN1876-6196

    Conference

    Conference23rd Conference EUROSENSORS 2009
    Abbreviated titleEurosensors XXIII
    CountrySwitzerland
    CityLausanne
    Period6/09/099/09/09

    Keywords

    • FBAR
    • full integrated
    • mass sensor matrix;
    • CMOS
    • bioelectronics

    Cite this

    Tukkiniemi, K., Rantala, A., Nirschl, M., Pitzer, D., Huber, T., & Schreiter, M. (2009). Fully integrated FBAR sensor matrix for mass detection. In Proceedings of the Eurosensors XXIII conference (pp. 1051-1054). Springer. Procedia Chemistry, No. 1, Vol.. 1 https://doi.org/10.1016/j.proche.2009.07.262