Microelectromechanical systems (MEMS) technology has been used for realizing G-band (140-220 GHz) distributed MEMS transmission line components. Novel dielectric-less MEMS components, as well as switched MEMS capacitors, have been fabricated with CMOS compatible surface micromachining, and experimental results are presented up to 220 GHz.
|Pages (from-to)||720 - 728|
|Number of pages||9|
|Journal||IEEE Transactions on Microwave Theory and Techniques|
|Publication status||Published - 2008|
|MoE publication type||A1 Journal article-refereed|
- RF MEMS
- microelectromechanical systems