GaAs Medipix2 hybrid pixel detector

Pasi Kostamo (Corresponding Author), Seppo Nenonen, Sami Vähänen, Lukas Tlustos, C. Fröjdh, M. Campbell, Yuri Zhilyaev, H. Lipsanen

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)

Abstract

A GaAs Medipix2 hybrid pixel detector based on high purity epitaxial GaAs material was successfully fabricated. The mesa type GaAs sensor with 256×256 pixels and total area of 1.4×1.4 cm2 was made of a 140-μm-thick epitaxial p–i–n structure utilizing reactive ion etching. A final thickness of approximately 110 μm for the all-epitaxial sensor element is achieved by back-thinning procedure. The sensor element is bump bonded to a Medipix2 read-out ASIC. The detector is capable of room temperature spectroscopic operation and it demonstrates the potential of GaAs for high resolution X-ray imaging systems operating at room temperature. This work describes the manufacturing process and electrical properties of the GaAs Medipix2 hybrid detector.
Original languageEnglish
Pages (from-to)174 - 177
Number of pages4
JournalNuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume591
Issue number1
DOIs
Publication statusPublished - 2008
MoE publication typeA1 Journal article-refereed

Fingerprint

Pixels
pixels
Detectors
sensors
detectors
Sensors
application specific integrated circuits
Reactive ion etching
mesas
room temperature
Application specific integrated circuits
Imaging systems
purity
Electric properties
manufacturing
electrical properties
etching
X rays
Temperature
high resolution

Keywords

  • GaAs
  • Medipix2
  • X-ray imaging

Cite this

Kostamo, Pasi ; Nenonen, Seppo ; Vähänen, Sami ; Tlustos, Lukas ; Fröjdh, C. ; Campbell, M. ; Zhilyaev, Yuri ; Lipsanen, H. / GaAs Medipix2 hybrid pixel detector. In: Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 2008 ; Vol. 591, No. 1. pp. 174 - 177.
@article{ccc57a2bb0f548b9bb2595f6baf1ed4c,
title = "GaAs Medipix2 hybrid pixel detector",
abstract = "A GaAs Medipix2 hybrid pixel detector based on high purity epitaxial GaAs material was successfully fabricated. The mesa type GaAs sensor with 256×256 pixels and total area of 1.4×1.4 cm2 was made of a 140-μm-thick epitaxial p–i–n structure utilizing reactive ion etching. A final thickness of approximately 110 μm for the all-epitaxial sensor element is achieved by back-thinning procedure. The sensor element is bump bonded to a Medipix2 read-out ASIC. The detector is capable of room temperature spectroscopic operation and it demonstrates the potential of GaAs for high resolution X-ray imaging systems operating at room temperature. This work describes the manufacturing process and electrical properties of the GaAs Medipix2 hybrid detector.",
keywords = "GaAs, Medipix2, X-ray imaging",
author = "Pasi Kostamo and Seppo Nenonen and Sami V{\"a}h{\"a}nen and Lukas Tlustos and C. Fr{\"o}jdh and M. Campbell and Yuri Zhilyaev and H. Lipsanen",
year = "2008",
doi = "10.1016/j.nima.2008.03.050",
language = "English",
volume = "591",
pages = "174 -- 177",
journal = "Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment",
issn = "0168-9002",
publisher = "Elsevier",
number = "1",

}

Kostamo, P, Nenonen, S, Vähänen, S, Tlustos, L, Fröjdh, C, Campbell, M, Zhilyaev, Y & Lipsanen, H 2008, 'GaAs Medipix2 hybrid pixel detector', Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, vol. 591, no. 1, pp. 174 - 177. https://doi.org/10.1016/j.nima.2008.03.050

GaAs Medipix2 hybrid pixel detector. / Kostamo, Pasi (Corresponding Author); Nenonen, Seppo; Vähänen, Sami; Tlustos, Lukas; Fröjdh, C.; Campbell, M.; Zhilyaev, Yuri; Lipsanen, H.

In: Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 591, No. 1, 2008, p. 174 - 177.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - GaAs Medipix2 hybrid pixel detector

AU - Kostamo, Pasi

AU - Nenonen, Seppo

AU - Vähänen, Sami

AU - Tlustos, Lukas

AU - Fröjdh, C.

AU - Campbell, M.

AU - Zhilyaev, Yuri

AU - Lipsanen, H.

PY - 2008

Y1 - 2008

N2 - A GaAs Medipix2 hybrid pixel detector based on high purity epitaxial GaAs material was successfully fabricated. The mesa type GaAs sensor with 256×256 pixels and total area of 1.4×1.4 cm2 was made of a 140-μm-thick epitaxial p–i–n structure utilizing reactive ion etching. A final thickness of approximately 110 μm for the all-epitaxial sensor element is achieved by back-thinning procedure. The sensor element is bump bonded to a Medipix2 read-out ASIC. The detector is capable of room temperature spectroscopic operation and it demonstrates the potential of GaAs for high resolution X-ray imaging systems operating at room temperature. This work describes the manufacturing process and electrical properties of the GaAs Medipix2 hybrid detector.

AB - A GaAs Medipix2 hybrid pixel detector based on high purity epitaxial GaAs material was successfully fabricated. The mesa type GaAs sensor with 256×256 pixels and total area of 1.4×1.4 cm2 was made of a 140-μm-thick epitaxial p–i–n structure utilizing reactive ion etching. A final thickness of approximately 110 μm for the all-epitaxial sensor element is achieved by back-thinning procedure. The sensor element is bump bonded to a Medipix2 read-out ASIC. The detector is capable of room temperature spectroscopic operation and it demonstrates the potential of GaAs for high resolution X-ray imaging systems operating at room temperature. This work describes the manufacturing process and electrical properties of the GaAs Medipix2 hybrid detector.

KW - GaAs

KW - Medipix2

KW - X-ray imaging

U2 - 10.1016/j.nima.2008.03.050

DO - 10.1016/j.nima.2008.03.050

M3 - Article

VL - 591

SP - 174

EP - 177

JO - Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

JF - Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

SN - 0168-9002

IS - 1

ER -