| Original language | English |
|---|---|
| Title of host publication | Proceedings - ALD 2010, 10th International Conference on Atomic Layer Deposition 2010 : June 20 - 23, 2010, Seoul, Korea |
| Edition | CD/DVD |
| Publication status | Published - 2010 |
| MoE publication type | B3 Non-refereed article in conference proceedings |
| Event | 10th International Conference on Atomic Layer Deposition, ALD 2010 - Seoul, Korea, Republic of Duration: 20 Jun 2010 → 23 Jun 2010 Conference number: 10 |
Conference
| Conference | 10th International Conference on Atomic Layer Deposition, ALD 2010 |
|---|---|
| Abbreviated title | ALD 2010 |
| Country/Territory | Korea, Republic of |
| City | Seoul |
| Period | 20/06/10 → 23/06/10 |