Gas detection with microelectromechanical Fabry-Perot interferometer technology in cell phone

Rami Mannila, Risto Hyypiö, Marko Korkalainen, Martti Blomberg, Hannu Kattelus, Anna Rissanen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

7 Citations (Scopus)

Abstract

VTT Technical Research Centre of Finland has developed a miniaturized optical sensor for gas detection in a cell phone. The sensor is based on a microelectromechanical (MEMS) Fabry-Perot interferometer, which is a structure with two highly reflective surfaces separated by a tunable air gap. The MEMS FPI is a monolithic device, i.e. it is made entirely on one substrate in a batch process, without assembling separate pieces together. The gap is adjusted by moving the upper mirror with electrostatic force, so there are no actual moving parts. VTT has designed and manufactured a MEMS FPI based carbon dioxide sensor demonstrator which is integrated to a cell phone shield cover. The demonstrator contains light source, gas cell, MEMS FPI, detector, control electronics and two coin cell batteries as a power source. It is connected to the cell phone by Bluetooth. By adjusting the wavelength range and customizing the MEMS FPI structure, it is possible to selectively sense multiple gases.
Original languageEnglish
Title of host publicationNext-Generation Spectroscopic Technologies VIII
PublisherInternational Society for Optics and Photonics SPIE
DOIs
Publication statusPublished - 2015
MoE publication typeA4 Article in a conference publication
EventNext-Generation Spectroscopic Technologies VIII - Baltimore, United States
Duration: 20 Apr 2015 → …

Publication series

SeriesProceedings of SPIE
Volume9482
ISSN0277-786X

Conference

ConferenceNext-Generation Spectroscopic Technologies VIII
CountryUnited States
CityBaltimore
Period20/04/15 → …

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Cite this

Mannila, R., Hyypiö, R., Korkalainen, M., Blomberg, M., Kattelus, H., & Rissanen, A. (2015). Gas detection with microelectromechanical Fabry-Perot interferometer technology in cell phone. In Next-Generation Spectroscopic Technologies VIII [94820P] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 9482 https://doi.org/10.1117/12.2176923