Gettering of poly-Si

Eero Lignell, Matti Leppihalme, Simo Eränen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publication11th Nordic Semiconductor Meeting
Place of PublicationEspoo
PublisherVTT Technical Research Centre of Finland
Pages289-292
ISBN (Print)951-38-2066-1
Publication statusPublished - 1984
MoE publication typeA4 Article in a conference publication
Event11th Nordic Semiconductor Meeting - Espoo, Finland
Duration: 11 Jun 198413 Jun 1984

Publication series

SeriesVTT Symposium
Number45
ISSN0357-9387

Conference

Conference11th Nordic Semiconductor Meeting
CountryFinland
CityEspoo
Period11/06/8413/06/84

Cite this

Lignell, E., Leppihalme, M., & Eränen, S. (1984). Gettering of poly-Si. In 11th Nordic Semiconductor Meeting (pp. 289-292). Espoo: VTT Technical Research Centre of Finland. VTT Symposium, No. 45
Lignell, Eero ; Leppihalme, Matti ; Eränen, Simo. / Gettering of poly-Si. 11th Nordic Semiconductor Meeting. Espoo : VTT Technical Research Centre of Finland, 1984. pp. 289-292 (VTT Symposium; No. 45).
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title = "Gettering of poly-Si",
author = "Eero Lignell and Matti Leppihalme and Simo Er{\"a}nen",
year = "1984",
language = "English",
isbn = "951-38-2066-1",
series = "VTT Symposium",
publisher = "VTT Technical Research Centre of Finland",
number = "45",
pages = "289--292",
booktitle = "11th Nordic Semiconductor Meeting",
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Lignell, E, Leppihalme, M & Eränen, S 1984, Gettering of poly-Si. in 11th Nordic Semiconductor Meeting. VTT Technical Research Centre of Finland, Espoo, VTT Symposium, no. 45, pp. 289-292, 11th Nordic Semiconductor Meeting, Espoo, Finland, 11/06/84.

Gettering of poly-Si. / Lignell, Eero; Leppihalme, Matti; Eränen, Simo.

11th Nordic Semiconductor Meeting. Espoo : VTT Technical Research Centre of Finland, 1984. p. 289-292 (VTT Symposium; No. 45).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Gettering of poly-Si

AU - Lignell, Eero

AU - Leppihalme, Matti

AU - Eränen, Simo

PY - 1984

Y1 - 1984

M3 - Conference article in proceedings

SN - 951-38-2066-1

T3 - VTT Symposium

SP - 289

EP - 292

BT - 11th Nordic Semiconductor Meeting

PB - VTT Technical Research Centre of Finland

CY - Espoo

ER -

Lignell E, Leppihalme M, Eränen S. Gettering of poly-Si. In 11th Nordic Semiconductor Meeting. Espoo: VTT Technical Research Centre of Finland. 1984. p. 289-292. (VTT Symposium; No. 45).