Glass polarization induced drift in microelectromechanical capacitor

Antti Haarahiltunen, Aapo Varpula, Joni Leinvuo, Esko Siren, Veli-Pekka Rytkönen, Hele Savin

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

Abstract

We present a quantitative physical model for glass substrate polarization and study the glass polarization by measuring the capacitance drift from microelectromechanical capacitor test structure. The model consists of mobile and immobile charge species, which are related to alkali metals and non-bridging oxygen in glass. The model explains consistently our results and the previously observed non-homogeneous charging effect in a radio-frequency switch fabricated on a glass substrate. The results indicate that the bulk properties of the glass layer itself can be a significant source of drift. The modeling allows estimation of the drift behavior of the several kinds of device structures.
Original languageEnglish
Article number103523
Number of pages4
JournalJournal of Applied Physics
Volume111
Issue number10
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

Fingerprint

capacitors
glass
polarization
alkali metals
charging
radio frequencies
switches
capacitance
oxygen

Keywords

  • Capacitance
  • capacitors
  • glass
  • microswitches

Cite this

Haarahiltunen, A., Varpula, A., Leinvuo, J., Siren, E., Rytkönen, V-P., & Savin, H. (2012). Glass polarization induced drift in microelectromechanical capacitor. Journal of Applied Physics, 111(10), [103523]. https://doi.org/10.1063/1.4720378
Haarahiltunen, Antti ; Varpula, Aapo ; Leinvuo, Joni ; Siren, Esko ; Rytkönen, Veli-Pekka ; Savin, Hele. / Glass polarization induced drift in microelectromechanical capacitor. In: Journal of Applied Physics. 2012 ; Vol. 111, No. 10.
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Haarahiltunen, A, Varpula, A, Leinvuo, J, Siren, E, Rytkönen, V-P & Savin, H 2012, 'Glass polarization induced drift in microelectromechanical capacitor', Journal of Applied Physics, vol. 111, no. 10, 103523. https://doi.org/10.1063/1.4720378

Glass polarization induced drift in microelectromechanical capacitor. / Haarahiltunen, Antti; Varpula, Aapo; Leinvuo, Joni; Siren, Esko; Rytkönen, Veli-Pekka; Savin, Hele.

In: Journal of Applied Physics, Vol. 111, No. 10, 103523, 2012.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Glass polarization induced drift in microelectromechanical capacitor

AU - Haarahiltunen, Antti

AU - Varpula, Aapo

AU - Leinvuo, Joni

AU - Siren, Esko

AU - Rytkönen, Veli-Pekka

AU - Savin, Hele

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AB - We present a quantitative physical model for glass substrate polarization and study the glass polarization by measuring the capacitance drift from microelectromechanical capacitor test structure. The model consists of mobile and immobile charge species, which are related to alkali metals and non-bridging oxygen in glass. The model explains consistently our results and the previously observed non-homogeneous charging effect in a radio-frequency switch fabricated on a glass substrate. The results indicate that the bulk properties of the glass layer itself can be a significant source of drift. The modeling allows estimation of the drift behavior of the several kinds of device structures.

KW - Capacitance

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KW - glass

KW - microswitches

U2 - 10.1063/1.4720378

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