Glass polarization induced drift in microelectromechanical capacitor

Antti Haarahiltunen, Aapo Varpula, Joni Leinvuo, Esko Siren, Veli-Pekka Rytkönen, Hele Savin

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)

    Abstract

    We present a quantitative physical model for glass substrate polarization and study the glass polarization by measuring the capacitance drift from microelectromechanical capacitor test structure. The model consists of mobile and immobile charge species, which are related to alkali metals and non-bridging oxygen in glass. The model explains consistently our results and the previously observed non-homogeneous charging effect in a radio-frequency switch fabricated on a glass substrate. The results indicate that the bulk properties of the glass layer itself can be a significant source of drift. The modeling allows estimation of the drift behavior of the several kinds of device structures.
    Original languageEnglish
    Article number103523
    Number of pages4
    JournalJournal of Applied Physics
    Volume111
    Issue number10
    DOIs
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    capacitors
    glass
    polarization
    alkali metals
    charging
    radio frequencies
    switches
    capacitance
    oxygen

    Keywords

    • Capacitance
    • capacitors
    • glass
    • microswitches

    Cite this

    Haarahiltunen, A., Varpula, A., Leinvuo, J., Siren, E., Rytkönen, V-P., & Savin, H. (2012). Glass polarization induced drift in microelectromechanical capacitor. Journal of Applied Physics, 111(10), [103523]. https://doi.org/10.1063/1.4720378
    Haarahiltunen, Antti ; Varpula, Aapo ; Leinvuo, Joni ; Siren, Esko ; Rytkönen, Veli-Pekka ; Savin, Hele. / Glass polarization induced drift in microelectromechanical capacitor. In: Journal of Applied Physics. 2012 ; Vol. 111, No. 10.
    @article{698ab8a4b04a4ce58af1d9ccf3199d52,
    title = "Glass polarization induced drift in microelectromechanical capacitor",
    abstract = "We present a quantitative physical model for glass substrate polarization and study the glass polarization by measuring the capacitance drift from microelectromechanical capacitor test structure. The model consists of mobile and immobile charge species, which are related to alkali metals and non-bridging oxygen in glass. The model explains consistently our results and the previously observed non-homogeneous charging effect in a radio-frequency switch fabricated on a glass substrate. The results indicate that the bulk properties of the glass layer itself can be a significant source of drift. The modeling allows estimation of the drift behavior of the several kinds of device structures.",
    keywords = "Capacitance, capacitors, glass, microswitches",
    author = "Antti Haarahiltunen and Aapo Varpula and Joni Leinvuo and Esko Siren and Veli-Pekka Rytk{\"o}nen and Hele Savin",
    year = "2012",
    doi = "10.1063/1.4720378",
    language = "English",
    volume = "111",
    journal = "Journal of Applied Physics",
    issn = "0021-8979",
    publisher = "American Institute of Physics AIP",
    number = "10",

    }

    Haarahiltunen, A, Varpula, A, Leinvuo, J, Siren, E, Rytkönen, V-P & Savin, H 2012, 'Glass polarization induced drift in microelectromechanical capacitor', Journal of Applied Physics, vol. 111, no. 10, 103523. https://doi.org/10.1063/1.4720378

    Glass polarization induced drift in microelectromechanical capacitor. / Haarahiltunen, Antti; Varpula, Aapo; Leinvuo, Joni; Siren, Esko; Rytkönen, Veli-Pekka; Savin, Hele.

    In: Journal of Applied Physics, Vol. 111, No. 10, 103523, 2012.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Glass polarization induced drift in microelectromechanical capacitor

    AU - Haarahiltunen, Antti

    AU - Varpula, Aapo

    AU - Leinvuo, Joni

    AU - Siren, Esko

    AU - Rytkönen, Veli-Pekka

    AU - Savin, Hele

    PY - 2012

    Y1 - 2012

    N2 - We present a quantitative physical model for glass substrate polarization and study the glass polarization by measuring the capacitance drift from microelectromechanical capacitor test structure. The model consists of mobile and immobile charge species, which are related to alkali metals and non-bridging oxygen in glass. The model explains consistently our results and the previously observed non-homogeneous charging effect in a radio-frequency switch fabricated on a glass substrate. The results indicate that the bulk properties of the glass layer itself can be a significant source of drift. The modeling allows estimation of the drift behavior of the several kinds of device structures.

    AB - We present a quantitative physical model for glass substrate polarization and study the glass polarization by measuring the capacitance drift from microelectromechanical capacitor test structure. The model consists of mobile and immobile charge species, which are related to alkali metals and non-bridging oxygen in glass. The model explains consistently our results and the previously observed non-homogeneous charging effect in a radio-frequency switch fabricated on a glass substrate. The results indicate that the bulk properties of the glass layer itself can be a significant source of drift. The modeling allows estimation of the drift behavior of the several kinds of device structures.

    KW - Capacitance

    KW - capacitors

    KW - glass

    KW - microswitches

    U2 - 10.1063/1.4720378

    DO - 10.1063/1.4720378

    M3 - Article

    VL - 111

    JO - Journal of Applied Physics

    JF - Journal of Applied Physics

    SN - 0021-8979

    IS - 10

    M1 - 103523

    ER -