Glass polarization induced drift in microelectromechanical capacitor

Antti Haarahiltunen; Aapo Varpula; Joni Leinvuo; Esko Siren; Veli-Pekka Rytkönen; Hele Savin

doi:10.1063/1.4720378

Glass polarization induced drift in microelectromechanical capacitor

Antti Haarahiltunen
, Aapo Varpula
, Joni Leinvuo
, Esko Siren
, Veli-Pekka Rytkönen
, Hele Savin

Aalto University
Murata Electronics Oy

Research output: Contribution to journal › Article › Scientific › peer-review

2 Citations (Scopus)

Abstract

We present a quantitative physical model for glass substrate polarization and study the glass polarization by measuring the capacitance drift from microelectromechanical capacitor test structure. The model consists of mobile and immobile charge species, which are related to alkali metals and non-bridging oxygen in glass. The model explains consistently our results and the previously observed non-homogeneous charging effect in a radio-frequency switch fabricated on a glass substrate. The results indicate that the bulk properties of the glass layer itself can be a significant source of drift. The modeling allows estimation of the drift behavior of the several kinds of device structures.

Original language	English
Article number	103523
Number of pages	4
Journal	Journal of Applied Physics
Volume	111
Issue number	10
DOIs	https://doi.org/10.1063/1.4720378
Publication status	Published - 2012
MoE publication type	A1 Journal article-refereed

Funding

A. Haarahiltunen, H. Savin, and A. Varpula acknowledge the financial support from the Academy of Finland.

Keywords

Capacitance
capacitors
glass
microswitches

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10.1063/1.4720378

https://urn.fi/URN:NBN:fi:aalto-201504092252Licence: CC BY-NC

Cite this

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title = "Glass polarization induced drift in microelectromechanical capacitor",

abstract = "We present a quantitative physical model for glass substrate polarization and study the glass polarization by measuring the capacitance drift from microelectromechanical capacitor test structure. The model consists of mobile and immobile charge species, which are related to alkali metals and non-bridging oxygen in glass. The model explains consistently our results and the previously observed non-homogeneous charging effect in a radio-frequency switch fabricated on a glass substrate. The results indicate that the bulk properties of the glass layer itself can be a significant source of drift. The modeling allows estimation of the drift behavior of the several kinds of device structures.",

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T1 - Glass polarization induced drift in microelectromechanical capacitor

AU - Haarahiltunen, Antti

AU - Varpula, Aapo

AU - Leinvuo, Joni

AU - Siren, Esko

AU - Rytkönen, Veli-Pekka

AU - Savin, Hele

PY - 2012

Y1 - 2012

N2 - We present a quantitative physical model for glass substrate polarization and study the glass polarization by measuring the capacitance drift from microelectromechanical capacitor test structure. The model consists of mobile and immobile charge species, which are related to alkali metals and non-bridging oxygen in glass. The model explains consistently our results and the previously observed non-homogeneous charging effect in a radio-frequency switch fabricated on a glass substrate. The results indicate that the bulk properties of the glass layer itself can be a significant source of drift. The modeling allows estimation of the drift behavior of the several kinds of device structures.

AB - We present a quantitative physical model for glass substrate polarization and study the glass polarization by measuring the capacitance drift from microelectromechanical capacitor test structure. The model consists of mobile and immobile charge species, which are related to alkali metals and non-bridging oxygen in glass. The model explains consistently our results and the previously observed non-homogeneous charging effect in a radio-frequency switch fabricated on a glass substrate. The results indicate that the bulk properties of the glass layer itself can be a significant source of drift. The modeling allows estimation of the drift behavior of the several kinds of device structures.

KW - Capacitance

KW - capacitors

KW - glass

KW - microswitches

U2 - 10.1063/1.4720378

DO - 10.1063/1.4720378

M3 - Article

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VL - 111

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 10

M1 - 103523

ER -

Glass polarization induced drift in microelectromechanical capacitor

Abstract

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Keywords

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