Glass polarization induced drift in microelectromechanical capacitor
- Antti Haarahiltunen
- , Aapo Varpula
- , Joni Leinvuo
- , Esko Siren
- , Veli-Pekka Rytkönen
- , Hele Savin
- Aalto University
- Murata Electronics Oy
Research output: Contribution to journal › Article › Scientific › peer-review
2
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(Scopus)