Glass polarization induced drift in microelectromechanical capacitor

Antti Haarahiltunen, Aapo Varpula, Joni Leinvuo, Esko Siren, Veli-Pekka Rytkönen, Hele Savin

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Glass polarization induced drift in microelectromechanical capacitor'. Together they form a unique fingerprint.

    Physics