Growth of GaAs and InAs by atomic layer epitaxy using Ga and in chlorides and AsH

Hannu Kattelus, Jouni Ahopelto, Ilkka Suni

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientific

    Fingerprint Dive into the research topics of 'Growth of GaAs and InAs by atomic layer epitaxy using Ga and in chlorides and AsH'. Together they form a unique fingerprint.

    Physics & Astronomy