Abstract
| Original language | English |
|---|---|
| Pages (from-to) | 50 - 57 |
| Journal | Thin Solid Films |
| Volume | 522 |
| Issue number | November |
| DOIs | |
| Publication status | Published - 2012 |
| MoE publication type | A1 Journal article-refereed |
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Keywords
- Aluminum oxide
- atomic force microscopy
- atomic layer deposition
- characterization
- growth
- thin film
- transition temperature microscopy
- x-ray photoelectron spectroscopy
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Growth of thin Al2O3 films on biaxially oriented polymer films by atomic layer deposition. / Vähä-Nissi, Mika; Kauppi, E.; Sahagian, K.; Johansson, L.-S.; Peresin, Soledad; Sievänen, Jenni; Harlin, Ali.
In: Thin Solid Films, Vol. 522, No. November, 2012, p. 50 - 57.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - Growth of thin Al2O3 films on biaxially oriented polymer films by atomic layer deposition
AU - Vähä-Nissi, Mika
AU - Kauppi, E.
AU - Sahagian, K.
AU - Johansson, L.-S.
AU - Peresin, Soledad
AU - Sievänen, Jenni
AU - Harlin, Ali
N1 - Project code: 70962
PY - 2012
Y1 - 2012
N2 - The effects of thin film nucleation and initial growth on roughness, chemistry and thermomechanical properties of polymer film surfaces were studied. Al2O3 was deposited onto commercial biaxially oriented polypropylene and polylactic acid films at 80 °C by using atomic layer deposition technique. Both substrates, especially the more hydrophobic polypropylene, showed initial growth through Al2O3 clusters. There was a faster deposition of Al2O3 on polylactic acid film than on polypropylene at the early stages of the Al2O3 deposition. There were also indications of chemical interactions between polylactic acid and trimethyl aluminum used as a precursor for Al2O3. Changes in the thermo-mechanical properties of the polymer surfaces with Al2O3also evidenced the differences between the substrate polymer films. The near surface interphase formed in polylactic acid probably contributed to the strong increase and scattering in the softening temperature during the early thin film growth
AB - The effects of thin film nucleation and initial growth on roughness, chemistry and thermomechanical properties of polymer film surfaces were studied. Al2O3 was deposited onto commercial biaxially oriented polypropylene and polylactic acid films at 80 °C by using atomic layer deposition technique. Both substrates, especially the more hydrophobic polypropylene, showed initial growth through Al2O3 clusters. There was a faster deposition of Al2O3 on polylactic acid film than on polypropylene at the early stages of the Al2O3 deposition. There were also indications of chemical interactions between polylactic acid and trimethyl aluminum used as a precursor for Al2O3. Changes in the thermo-mechanical properties of the polymer surfaces with Al2O3also evidenced the differences between the substrate polymer films. The near surface interphase formed in polylactic acid probably contributed to the strong increase and scattering in the softening temperature during the early thin film growth
KW - Aluminum oxide
KW - atomic force microscopy
KW - atomic layer deposition
KW - characterization
KW - growth
KW - thin film
KW - transition temperature microscopy
KW - x-ray photoelectron spectroscopy
U2 - 10.1016/j.tsf.2012.09.043
DO - 10.1016/j.tsf.2012.09.043
M3 - Article
VL - 522
SP - 50
EP - 57
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
IS - November
ER -