Growth of ZnS by ALE without chloride compounds

Markku Ylilammi, Timo Ranta-aho

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationProceedings of the 15th Nordic Semiconductor Meeting
EditorsSami Franssila, Riitta Paananen
Place of PublicationEspoo
PublisherVTT Technical Research Centre of Finland
Pages43-46
ISBN (Print)951-47-6261-4
Publication statusPublished - 1992
MoE publication typeA4 Article in a conference publication
Event15th Nordic Semiconductor Meeting - Hämeenlinna, Finland
Duration: 9 Jun 199211 Jun 1992
Conference number: 15

Conference

Conference15th Nordic Semiconductor Meeting
CountryFinland
CityHämeenlinna
Period9/06/9211/06/92

Cite this

Ylilammi, M., & Ranta-aho, T. (1992). Growth of ZnS by ALE without chloride compounds. In S. Franssila, & R. Paananen (Eds.), Proceedings of the 15th Nordic Semiconductor Meeting (pp. 43-46). VTT Technical Research Centre of Finland.