Growth of ZnS by ALE without chloride compounds

Markku Ylilammi, Timo Ranta-aho

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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1992

Proceedings of the 15th Nordic Semiconductor Meeting
Franssila, S. (Editor) & Paananen, R. (Editor), 1992, Espoo: VTT Technical Research Centre of Finland. 380 p.
Research output: Book/Report › Book (editor) › Scientific › peer-review