HEPA liquid filter in Silicon-on-Insulator

Kai Kolari, Ari Hokkanen, Toni Paasikallio, Juha-Pekka Pitkänen

Research output: Contribution to conferenceConference articleScientific

Original languageEnglish
Publication statusPublished - 2010
MoE publication typeNot Eligible
Event36th International Conference on Micro- and Nano-Engineering, MNE 2010 - Genoa, Italy
Duration: 19 Sep 201022 Sep 2010

Conference

Conference36th International Conference on Micro- and Nano-Engineering, MNE 2010
Abbreviated titleMNE 2010
CountryItaly
CityGenoa
Period19/09/1022/09/10

Cite this

Kolari, K., Hokkanen, A., Paasikallio, T., & Pitkänen, J-P. (2010). HEPA liquid filter in Silicon-on-Insulator. Paper presented at 36th International Conference on Micro- and Nano-Engineering, MNE 2010, Genoa, Italy.