HEPA liquid filter in Silicon-on-Insulator

Kai Kolari, Ari Hokkanen, Toni Paasikallio, Juha-Pekka Pitkänen

Research output: Contribution to conference › Conference article › Scientific

Original language	English
Publication status	Published - 2010
MoE publication type	Not Eligible
Event	36th International Conference on Micro- and Nano-Engineering, MNE 2010 - Genoa, Italy Duration: 19 Sept 2010 → 22 Sept 2010

Conference	36th International Conference on Micro- and Nano-Engineering, MNE 2010
Abbreviated title	MNE 2010
Country/Territory	Italy
City	Genoa
Period	19/09/10 → 22/09/10

Cite this

@conference{5ef7d7d1aebc4f56b14a672400acc6dd,

title = "HEPA liquid filter in Silicon-on-Insulator",

author = "Kai Kolari and Ari Hokkanen and Toni Paasikallio and Juha-Pekka Pitk{\"a}nen",

year = "2010",

language = "English",

note = "36th International Conference on Micro- and Nano-Engineering, MNE 2010, MNE 2010 ; Conference date: 19-09-2010 Through 22-09-2010",

}