HEPA liquid filter in Silicon-on-Insulator

Kai Kolari, Ari Hokkanen, Toni Paasikallio, Juha-Pekka Pitkänen

    Research output: Contribution to conferenceConference articleScientific

    Original languageEnglish
    Publication statusPublished - 2010
    MoE publication typeNot Eligible
    Event36th International Conference on Micro- and Nano-Engineering, MNE 2010 - Genoa, Italy
    Duration: 19 Sep 201022 Sep 2010

    Conference

    Conference36th International Conference on Micro- and Nano-Engineering, MNE 2010
    Abbreviated titleMNE 2010
    Country/TerritoryItaly
    CityGenoa
    Period19/09/1022/09/10

    Cite this