HEPA liquid filter in Silicon-on-Insulator

Kai Kolari, Ari Hokkanen, Toni Paasikallio, Juha-Pekka Pitkänen

Research output: Contribution to conferenceConference articleScientific

Original languageEnglish
Publication statusPublished - 2010
MoE publication typeNot Eligible
Event36th International Conference on Micro- and Nano-Engineering, MNE 2010 - Genoa, Italy
Duration: 19 Sep 201022 Sep 2010

Conference

Conference36th International Conference on Micro- and Nano-Engineering, MNE 2010
Abbreviated titleMNE 2010
CountryItaly
CityGenoa
Period19/09/1022/09/10

Cite this

Kolari, K., Hokkanen, A., Paasikallio, T., & Pitkänen, J-P. (2010). HEPA liquid filter in Silicon-on-Insulator. Paper presented at 36th International Conference on Micro- and Nano-Engineering, MNE 2010, Genoa, Italy.
Kolari, Kai ; Hokkanen, Ari ; Paasikallio, Toni ; Pitkänen, Juha-Pekka. / HEPA liquid filter in Silicon-on-Insulator. Paper presented at 36th International Conference on Micro- and Nano-Engineering, MNE 2010, Genoa, Italy.
@conference{5ef7d7d1aebc4f56b14a672400acc6dd,
title = "HEPA liquid filter in Silicon-on-Insulator",
author = "Kai Kolari and Ari Hokkanen and Toni Paasikallio and Juha-Pekka Pitk{\"a}nen",
year = "2010",
language = "English",
note = "36th International Conference on Micro- and Nano-Engineering, MNE 2010, MNE 2010 ; Conference date: 19-09-2010 Through 22-09-2010",

}

Kolari, K, Hokkanen, A, Paasikallio, T & Pitkänen, J-P 2010, 'HEPA liquid filter in Silicon-on-Insulator' Paper presented at 36th International Conference on Micro- and Nano-Engineering, MNE 2010, Genoa, Italy, 19/09/10 - 22/09/10, .

HEPA liquid filter in Silicon-on-Insulator. / Kolari, Kai; Hokkanen, Ari; Paasikallio, Toni; Pitkänen, Juha-Pekka.

2010. Paper presented at 36th International Conference on Micro- and Nano-Engineering, MNE 2010, Genoa, Italy.

Research output: Contribution to conferenceConference articleScientific

TY - CONF

T1 - HEPA liquid filter in Silicon-on-Insulator

AU - Kolari, Kai

AU - Hokkanen, Ari

AU - Paasikallio, Toni

AU - Pitkänen, Juha-Pekka

PY - 2010

Y1 - 2010

M3 - Conference article

ER -

Kolari K, Hokkanen A, Paasikallio T, Pitkänen J-P. HEPA liquid filter in Silicon-on-Insulator. 2010. Paper presented at 36th International Conference on Micro- and Nano-Engineering, MNE 2010, Genoa, Italy.