High-Accuracy autocollimator calibration by interferometric 2D angle generator

Ville Heikkinen, Ville Byman, Maksim Shpak, R. Geckeler, A. Just, M. Krause, M. Schumann, Antti Lassila

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    4 Citations (Scopus)


    Autocollimators are excellent measuring tools for many applications, such as adjustments or characterizations of precision mechanics, optics and instruments. Autocollimators have several characteristic error sources due to misalignment or nonideality of the collimator lens, the light source and the sensor. To fully characterize errors related to simultaneous engagement of both measurement axes of the autocollimator a two directional angle generator is necessary. In this paper, VTT MIKES interferometric 2-directional small angle generator (I2D-SAG) with updated model for calibration of autocollimators is described. It generates angles around 2 orthogonal axes with high accuracy. The maximum range of the I2D-SAG is ±1000" for both axes. In calibration of a high quality autocollimator a standard uncertainty below 0.01" can be reached. In addition, preliminary results of a comparison of I2D-SAG and PTB Spatial Angle Autocollimator Calibrator (SAAC) instrument are presented. This is the first comparison between 2D autocollimator calibration systems. In this comparison, a good agreement was reached in characterization of an electronic autocollimator over 900"×900" range.

    Original languageEnglish
    Title of host publicationAdvances in Metrology for X-Ray and EUV Optics VIII
    EditorsLahsen Assoufid, Haruhiko Ohashi, Anand Krishna Asundi
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)978-1-5106-2911-0
    Publication statusPublished - 9 Sept 2019
    MoE publication typeA4 Article in a conference publication
    EventAdvances in Metrology for X-Ray and EUV Optics VIII 2019 - San Diego, United States
    Duration: 11 Aug 201912 Aug 2019

    Publication series

    SeriesProceedings of SPIE


    ConferenceAdvances in Metrology for X-Ray and EUV Optics VIII 2019
    Country/TerritoryUnited States
    CitySan Diego


    • Autocollimator
    • Calibration
    • Comparison
    • Interferometric
    • Small angle generator


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