High-Accuracy autocollimator calibration by interferometric 2D angle generator

V. Heikkinen, V. Byman, M. Shpak, R. Geckeler, A. Just, M. Krause, M. Schumann, A. Lassila

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)

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