High accuracy step gauge interferometer

V. Byman, T. Jaakkola, I. Palosuo, A. Lassila

    Research output: Contribution to journalArticleScientificpeer-review

    7 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'High accuracy step gauge interferometer'. Together they form a unique fingerprint.

    Mathematics

    Engineering & Materials Science

    Physics & Astronomy