High Aspect Ratio Microstructures (HARMS)

Sami Franssila, Matti Leppihalme, Pekka Kuivalainen

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Professional

Original language	English
Title of host publication	National Programme on Electronic Materials and Microsystems
Subtitle of host publication	Research Reports
Place of Publication	Helsinki
Publisher	Suomen akatemia
Pages	25-38
ISBN (Electronic)	951-715-417-8
ISBN (Print)	951-715-416-x
Publication status	Published - 2002
MoE publication type	D2 Article in professional manuals or guides or professional information systems or text book material

Access to Document

@inbook{13f658dc98fa4d26af47d26992cfbbf3,

title = "High Aspect Ratio Microstructures (HARMS)",

author = "Sami Franssila and Matti Leppihalme and Pekka Kuivalainen",

year = "2002",

language = "English",

isbn = "951-715-416-x",

pages = "25--38",

booktitle = "National Programme on Electronic Materials and Microsystems",

publisher = "Suomen akatemia",

address = "Finland",

}