High-Frequency Mechanical Excitation of a Silicon Nanostring with Piezoelectric Aluminum Nitride Layers

Alessandro Pitanti (Corresponding Author), Tapani Makkonen, Martin F. Colombano, Simone Zanotto, Leonardo Vicarelli, Marco Cecchini, Amadeu Griol, Daniel Navarro-Urrios, Clivia Sotomayor-Torres, Alejandro Martinez, Jouni Ahopelto

Research output: Contribution to journal › Article › Scientific › peer-review

11 Citations (Scopus)

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Engineering

Material Science