High Frequency Optoelectromechanical Nanocrystalline Silicon Nanobeams

Sara Pourjamal; Oili Ylivaara; L. Mercadé; Tapani Makkonen; A. Martinez; Jouni Ahopelto

doi:10.1109/NMDC57951.2023.10343647

High Frequency Optoelectromechanical Nanocrystalline Silicon Nanobeams

Sara Pourjamal^*, Oili Ylivaara, L. Mercadé, Tapani Makkonen, A. Martinez, Jouni Ahopelto^*

^*Corresponding author for this work

Universitat Politècnica de València (UPV)

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

Nano-optoelectromechanics is an emerging field with prospects for efficient and low-power devices for information technology operating at GHz frequency range. To capitalize the prospects, a flexible and up-scalable technology platform has to be established. Nanocrystalline silicon has only recently been used in nano-optoelectromechanical systems with very promising results. Here we investigate further the properties of nanocrystalline silicon relevant for optoelectromechanics and demonstrate operation of nanobeams at several gigahertz frequencies.

Original language	English
Title of host publication	2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	829-830
ISBN (Electronic)	9798350335460
DOIs	https://doi.org/10.1109/NMDC57951.2023.10343647
Publication status	Published - 2023
MoE publication type	A4 Article in a conference publication
Event	18th IEEE Nanotechnology Materials and Devices Conference, NMDC 2023 - Paestum, Italy Duration: 22 Oct 2023 → 25 Oct 2023

Conference

Conference	18th IEEE Nanotechnology Materials and Devices Conference, NMDC 2023
Country/Territory	Italy
City	Paestum
Period	22/10/23 → 25/10/23

Funding

ACKNOWLEDGMENT This work has been partially supported by the European Commission funded project MAGNIFIC (Horizon Europe 101091968) and ERA-NET CHISTERA project MUSICIAN.

Access to Document

10.1109/NMDC57951.2023.10343647

Cite this

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title = "High Frequency Optoelectromechanical Nanocrystalline Silicon Nanobeams",

abstract = "Nano-optoelectromechanics is an emerging field with prospects for efficient and low-power devices for information technology operating at GHz frequency range. To capitalize the prospects, a flexible and up-scalable technology platform has to be established. Nanocrystalline silicon has only recently been used in nano-optoelectromechanical systems with very promising results. Here we investigate further the properties of nanocrystalline silicon relevant for optoelectromechanics and demonstrate operation of nanobeams at several gigahertz frequencies.",

author = "Sara Pourjamal and Oili Ylivaara and L. Mercad{\'e} and Tapani Makkonen and A. Martinez and Jouni Ahopelto",

note = "Publisher Copyright: {\textcopyright} 2023 IEEE.; 18th IEEE Nanotechnology Materials and Devices Conference, NMDC 2023 ; Conference date: 22-10-2023 Through 25-10-2023",

year = "2023",

doi = "10.1109/NMDC57951.2023.10343647",

language = "English",

pages = "829--830",

booktitle = "2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

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Pourjamal, S , Ylivaara, O, Mercadé, L, Makkonen, T, Martinez, A & Ahopelto, J 2023, High Frequency Optoelectromechanical Nanocrystalline Silicon Nanobeams. in 2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023. IEEE Institute of Electrical and Electronic Engineers, pp. 829-830, 18th IEEE Nanotechnology Materials and Devices Conference, NMDC 2023, Paestum, Italy, 22/10/23. https://doi.org/10.1109/NMDC57951.2023.10343647

High Frequency Optoelectromechanical Nanocrystalline Silicon Nanobeams. / Pourjamal, Sara ; Ylivaara, Oili; Mercadé, L. et al.
2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023. IEEE Institute of Electrical and Electronic Engineers, 2023. p. 829-830.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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AU - Ylivaara, Oili

AU - Mercadé, L.

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AU - Martinez, A.

AU - Ahopelto, Jouni

PY - 2023

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AB - Nano-optoelectromechanics is an emerging field with prospects for efficient and low-power devices for information technology operating at GHz frequency range. To capitalize the prospects, a flexible and up-scalable technology platform has to be established. Nanocrystalline silicon has only recently been used in nano-optoelectromechanical systems with very promising results. Here we investigate further the properties of nanocrystalline silicon relevant for optoelectromechanics and demonstrate operation of nanobeams at several gigahertz frequencies.

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T2 - 18th IEEE Nanotechnology Materials and Devices Conference, NMDC 2023

Y2 - 22 October 2023 through 25 October 2023

ER -

High Frequency Optoelectromechanical Nanocrystalline Silicon Nanobeams

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High Frequency Optoelectromechanical Nanocrystalline Silicon Nanobeams

Abstract

Conference

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OtaNano

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