Abstract
Nano-optoelectromechanics is an emerging field with prospects for efficient and low-power devices for information technology operating at GHz frequency range. To capitalize the prospects, a flexible and up-scalable technology platform has to be established. Nanocrystalline silicon has only recently been used in nano-optoelectromechanical systems with very promising results. Here we investigate further the properties of nanocrystalline silicon relevant for optoelectromechanics and demonstrate operation of nanobeams at several gigahertz frequencies.
| Original language | English |
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| Title of host publication | 2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023 |
| Publisher | IEEE Institute of Electrical and Electronic Engineers |
| Pages | 829-830 |
| ISBN (Electronic) | 9798350335460 |
| DOIs | |
| Publication status | Published - 2023 |
| MoE publication type | A4 Article in a conference publication |
| Event | 18th IEEE Nanotechnology Materials and Devices Conference, NMDC 2023 - Paestum, Italy Duration: 22 Oct 2023 → 25 Oct 2023 |
Conference
| Conference | 18th IEEE Nanotechnology Materials and Devices Conference, NMDC 2023 |
|---|---|
| Country/Territory | Italy |
| City | Paestum |
| Period | 22/10/23 → 25/10/23 |
Funding
ACKNOWLEDGMENT This work has been partially supported by the European Commission funded project MAGNIFIC (Horizon Europe 101091968) and ERA-NET CHISTERA project MUSICIAN.