High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
- Henri Jussila*
- , Päivi Mattila
- , Jani Oksanen
- , Alexander Perros
- , Juha Riikonen
- , Markus Bosund
- , Aapo Varpula
- , Teppo Huhtio
- , Harri Lipsanen
- , Markku Sopanen
*Corresponding author for this work
- Aalto University
- Beneq Oy
Research output: Contribution to journal › Article › Scientific › peer-review
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