High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning

Henri Jussila (Corresponding Author), Päivi Mattila, Jani Oksanen, Alexander Perros, Juha Riikonen, Markus Bosund, Aapo Varpula, Teppo Huhtio, Harri Lipsanen, Markku Sopanen

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    Physics & Astronomy