High-Q micromechanical resonators for mass sensing in dissipative media

    Research output: Contribution to journalArticleScientificpeer-review

    11 Citations (Scopus)

    Abstract

    Single crystal silicon-based micromechanical resonators are developed for mass sensing in dissipative media. The design aspects and preliminary characterization of the resonators are presented. For the suggested designs, quality factors of about 20 000 are typically measured in air at atmospheric pressure and 1000–2000 in contact with liquid. The performance is based on a wine-glass-type lateral bulk acoustic mode excited in a rectangular resonator plate. The mode essentially eliminates the radiation of acoustic energy into the sample media leaving viscous drag as the dominant fluid-based dissipation mechanism in the system. For a mass loading distributed over the central areas of the resonator a sensitivity of 27 ppm ng−1 is measured exhibiting good agreement with the results of the finite element method-based simulations. It is also shown that the mass sensitivity can be somewhat enhanced, not only by the proper distribution of the loaded mass, but also by introducing shallow barrier structures on the resonator.
    Original languageEnglish
    Article number065002
    Number of pages7
    JournalJournal of Micromechanics and Microengineering
    Volume21
    Issue number6
    DOIs
    Publication statusPublished - 2011
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Micromechanical resonators
    Resonators
    Wine
    Silicon
    Contacts (fluid mechanics)
    Atmospheric pressure
    Drag
    Acoustics
    Single crystals
    Finite element method
    Radiation
    Glass
    Fluids
    Liquids
    Air

    Keywords

    • mass sensor
    • MEMS resonator
    • quality factor
    • lateral bulk acoustic wave
    • wine-glass mode

    Cite this

    @article{8044d2dda125497981c2244af3650557,
    title = "High-Q micromechanical resonators for mass sensing in dissipative media",
    abstract = "Single crystal silicon-based micromechanical resonators are developed for mass sensing in dissipative media. The design aspects and preliminary characterization of the resonators are presented. For the suggested designs, quality factors of about 20 000 are typically measured in air at atmospheric pressure and 1000–2000 in contact with liquid. The performance is based on a wine-glass-type lateral bulk acoustic mode excited in a rectangular resonator plate. The mode essentially eliminates the radiation of acoustic energy into the sample media leaving viscous drag as the dominant fluid-based dissipation mechanism in the system. For a mass loading distributed over the central areas of the resonator a sensitivity of 27 ppm ng−1 is measured exhibiting good agreement with the results of the finite element method-based simulations. It is also shown that the mass sensitivity can be somewhat enhanced, not only by the proper distribution of the loaded mass, but also by introducing shallow barrier structures on the resonator.",
    keywords = "mass sensor, MEMS resonator, quality factor, lateral bulk acoustic wave, wine-glass mode",
    author = "Kirsi Tappura and Panu Pekko and Heikki Sepp{\"a}",
    note = "Project code: T5SU00752",
    year = "2011",
    doi = "10.1088/0960-1317/21/6/065002",
    language = "English",
    volume = "21",
    journal = "Journal of Micromechanics and Microengineering",
    issn = "0960-1317",
    publisher = "Institute of Physics IOP",
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    }

    High-Q micromechanical resonators for mass sensing in dissipative media. / Tappura, Kirsi; Pekko, Panu; Seppä, Heikki.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 6, 065002, 2011.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - High-Q micromechanical resonators for mass sensing in dissipative media

    AU - Tappura, Kirsi

    AU - Pekko, Panu

    AU - Seppä, Heikki

    N1 - Project code: T5SU00752

    PY - 2011

    Y1 - 2011

    N2 - Single crystal silicon-based micromechanical resonators are developed for mass sensing in dissipative media. The design aspects and preliminary characterization of the resonators are presented. For the suggested designs, quality factors of about 20 000 are typically measured in air at atmospheric pressure and 1000–2000 in contact with liquid. The performance is based on a wine-glass-type lateral bulk acoustic mode excited in a rectangular resonator plate. The mode essentially eliminates the radiation of acoustic energy into the sample media leaving viscous drag as the dominant fluid-based dissipation mechanism in the system. For a mass loading distributed over the central areas of the resonator a sensitivity of 27 ppm ng−1 is measured exhibiting good agreement with the results of the finite element method-based simulations. It is also shown that the mass sensitivity can be somewhat enhanced, not only by the proper distribution of the loaded mass, but also by introducing shallow barrier structures on the resonator.

    AB - Single crystal silicon-based micromechanical resonators are developed for mass sensing in dissipative media. The design aspects and preliminary characterization of the resonators are presented. For the suggested designs, quality factors of about 20 000 are typically measured in air at atmospheric pressure and 1000–2000 in contact with liquid. The performance is based on a wine-glass-type lateral bulk acoustic mode excited in a rectangular resonator plate. The mode essentially eliminates the radiation of acoustic energy into the sample media leaving viscous drag as the dominant fluid-based dissipation mechanism in the system. For a mass loading distributed over the central areas of the resonator a sensitivity of 27 ppm ng−1 is measured exhibiting good agreement with the results of the finite element method-based simulations. It is also shown that the mass sensitivity can be somewhat enhanced, not only by the proper distribution of the loaded mass, but also by introducing shallow barrier structures on the resonator.

    KW - mass sensor

    KW - MEMS resonator

    KW - quality factor

    KW - lateral bulk acoustic wave

    KW - wine-glass mode

    U2 - 10.1088/0960-1317/21/6/065002

    DO - 10.1088/0960-1317/21/6/065002

    M3 - Article

    VL - 21

    JO - Journal of Micromechanics and Microengineering

    JF - Journal of Micromechanics and Microengineering

    SN - 0960-1317

    IS - 6

    M1 - 065002

    ER -