High-Q micromechanical resonators for mass sensing in dissipative media

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Abstract

Single crystal silicon-based micromechanical resonators are developed for mass sensing in dissipative media. The design aspects and preliminary characterization of the resonators are presented. For the suggested designs, quality factors of about 20 000 are typically measured in air at atmospheric pressure and 1000–2000 in contact with liquid. The performance is based on a wine-glass-type lateral bulk acoustic mode excited in a rectangular resonator plate. The mode essentially eliminates the radiation of acoustic energy into the sample media leaving viscous drag as the dominant fluid-based dissipation mechanism in the system. For a mass loading distributed over the central areas of the resonator a sensitivity of 27 ppm ng−1 is measured exhibiting good agreement with the results of the finite element method-based simulations. It is also shown that the mass sensitivity can be somewhat enhanced, not only by the proper distribution of the loaded mass, but also by introducing shallow barrier structures on the resonator.
Original languageEnglish
Article number065002
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume21
Issue number6
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

Fingerprint

Micromechanical resonators
Resonators
Wine
Silicon
Contacts (fluid mechanics)
Atmospheric pressure
Drag
Acoustics
Single crystals
Finite element method
Radiation
Glass
Fluids
Liquids
Air

Keywords

  • mass sensor
  • MEMS resonator
  • quality factor
  • lateral bulk acoustic wave
  • wine-glass mode

Cite this

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title = "High-Q micromechanical resonators for mass sensing in dissipative media",
abstract = "Single crystal silicon-based micromechanical resonators are developed for mass sensing in dissipative media. The design aspects and preliminary characterization of the resonators are presented. For the suggested designs, quality factors of about 20 000 are typically measured in air at atmospheric pressure and 1000–2000 in contact with liquid. The performance is based on a wine-glass-type lateral bulk acoustic mode excited in a rectangular resonator plate. The mode essentially eliminates the radiation of acoustic energy into the sample media leaving viscous drag as the dominant fluid-based dissipation mechanism in the system. For a mass loading distributed over the central areas of the resonator a sensitivity of 27 ppm ng−1 is measured exhibiting good agreement with the results of the finite element method-based simulations. It is also shown that the mass sensitivity can be somewhat enhanced, not only by the proper distribution of the loaded mass, but also by introducing shallow barrier structures on the resonator.",
keywords = "mass sensor, MEMS resonator, quality factor, lateral bulk acoustic wave, wine-glass mode",
author = "Kirsi Tappura and Panu Pekko and Heikki Sepp{\"a}",
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High-Q micromechanical resonators for mass sensing in dissipative media. / Tappura, Kirsi; Pekko, Panu; Seppä, Heikki.

In: Journal of Micromechanics and Microengineering, Vol. 21, No. 6, 065002, 2011.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - High-Q micromechanical resonators for mass sensing in dissipative media

AU - Tappura, Kirsi

AU - Pekko, Panu

AU - Seppä, Heikki

N1 - Project code: T5SU00752

PY - 2011

Y1 - 2011

N2 - Single crystal silicon-based micromechanical resonators are developed for mass sensing in dissipative media. The design aspects and preliminary characterization of the resonators are presented. For the suggested designs, quality factors of about 20 000 are typically measured in air at atmospheric pressure and 1000–2000 in contact with liquid. The performance is based on a wine-glass-type lateral bulk acoustic mode excited in a rectangular resonator plate. The mode essentially eliminates the radiation of acoustic energy into the sample media leaving viscous drag as the dominant fluid-based dissipation mechanism in the system. For a mass loading distributed over the central areas of the resonator a sensitivity of 27 ppm ng−1 is measured exhibiting good agreement with the results of the finite element method-based simulations. It is also shown that the mass sensitivity can be somewhat enhanced, not only by the proper distribution of the loaded mass, but also by introducing shallow barrier structures on the resonator.

AB - Single crystal silicon-based micromechanical resonators are developed for mass sensing in dissipative media. The design aspects and preliminary characterization of the resonators are presented. For the suggested designs, quality factors of about 20 000 are typically measured in air at atmospheric pressure and 1000–2000 in contact with liquid. The performance is based on a wine-glass-type lateral bulk acoustic mode excited in a rectangular resonator plate. The mode essentially eliminates the radiation of acoustic energy into the sample media leaving viscous drag as the dominant fluid-based dissipation mechanism in the system. For a mass loading distributed over the central areas of the resonator a sensitivity of 27 ppm ng−1 is measured exhibiting good agreement with the results of the finite element method-based simulations. It is also shown that the mass sensitivity can be somewhat enhanced, not only by the proper distribution of the loaded mass, but also by introducing shallow barrier structures on the resonator.

KW - mass sensor

KW - MEMS resonator

KW - quality factor

KW - lateral bulk acoustic wave

KW - wine-glass mode

U2 - 10.1088/0960-1317/21/6/065002

DO - 10.1088/0960-1317/21/6/065002

M3 - Article

VL - 21

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

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ER -