High quality factor integrated passive devices for microwave and millimeter wave applications

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Abstract

A fabrication process and multi project wafer run (MPW) service has been developed for realizing integrated passive devices. The fabrication process is simple and low cost ranging applications from consumer electronics to instrumentation and measurement as well as defense and scientific applications. The fabrication process is offered as an MPW service for all types of organizations being suitable for scientific experiments, product prototyping or optimization. The technology has used for realizing microwave and millimeter wave components. Measured result show that the technology as well as accurate design result in loss less than 1.1 dB at 60 GHz for an integrated band-pass filter. (2 refs.)
Original languageEnglish
Title of host publicationNanosensors, Biosensors, and Info-Tech Sensors and Systems 2009
PublisherInternational Society for Optics and Photonics SPIE
Number of pages6
DOIs
Publication statusPublished - 2009
MoE publication typeA4 Article in a conference publication
EventNanosensors, Biosensors, and Info-Tech Sensors and Systems. San Diego, CA, USA, 9 - 11 March 2009 -
Duration: 1 Jan 2009 → …

Publication series

SeriesProceedings of SPIE
Number7291
ISSN0277-786X

Conference

ConferenceNanosensors, Biosensors, and Info-Tech Sensors and Systems. San Diego, CA, USA, 9 - 11 March 2009
Period1/01/09 → …

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Vähä-Heikkilä, T. (2009). High quality factor integrated passive devices for microwave and millimeter wave applications. In Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009 [72910E ] International Society for Optics and Photonics SPIE. Proceedings of SPIE, No. 7291 https://doi.org/10.1117/12.815263