High quality factor integrated passive devices for microwave and millimeter wave applications

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Abstract

A fabrication process and multi project wafer run (MPW) service has been developed for realizing integrated passive devices. The fabrication process is simple and low cost ranging applications from consumer electronics to instrumentation and measurement as well as defense and scientific applications. The fabrication process is offered as an MPW service for all types of organizations being suitable for scientific experiments, product prototyping or optimization. The technology has used for realizing microwave and millimeter wave components. Measured result show that the technology as well as accurate design result in loss less than 1.1 dB at 60 GHz for an integrated band-pass filter.
Original languageEnglish
Title of host publicationProceedings of 5th ESA Workshop on Millimetre Wave Technology and Applications
Place of PublicationNoordwijk
PublisherEuropean Space Agency ESA
Pages247-251
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication
Event5th ESA Workshop on Millimetre Wave Technology and Applications and 31st ESA Antenna Workshop - ESTEC, Noordwijk, Netherlands
Duration: 18 May 200920 May 2009

Conference

Conference5th ESA Workshop on Millimetre Wave Technology and Applications and 31st ESA Antenna Workshop
CountryNetherlands
CityNoordwijk
Period18/05/0920/05/09

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Keywords

  • IPD
  • integrated passive devices
  • filter
  • millimeter wave

Cite this

Vähä-Heikkilä, T., Marttila, I., & Heikkinen, H. (2010). High quality factor integrated passive devices for microwave and millimeter wave applications. In Proceedings of 5th ESA Workshop on Millimetre Wave Technology and Applications (pp. 247-251). European Space Agency ESA.