A fabrication process and multi project wafer run (MPW) service has been developed for realizing integrated passive devices. The fabrication process is simple and low cost ranging applications from consumer electronics to instrumentation and measurement as well as defense and scientific applications. The fabrication process is offered as an MPW service for all types of organizations being suitable for scientific experiments, product prototyping or optimization. The technology has used for realizing microwave and millimeter wave components. Measured result show that the technology as well as accurate design result in loss less than 1.1 dB at 60 GHz for an integrated band-pass filter.
|Title of host publication||Proceedings of 5th ESA Workshop on Millimetre Wave Technology and Applications|
|Place of Publication||Noordwijk|
|Publisher||European Space Agency ESA|
|Publication status||Published - 2010|
|MoE publication type||A4 Article in a conference publication|
|Event||5th ESA Workshop on Millimetre Wave Technology and Applications and 31st ESA Antenna Workshop - ESTEC, Noordwijk, Netherlands|
Duration: 18 May 2009 → 20 May 2009
|Conference||5th ESA Workshop on Millimetre Wave Technology and Applications and 31st ESA Antenna Workshop|
|Period||18/05/09 → 20/05/09|
- integrated passive devices
- millimeter wave
Vähä-Heikkilä, T., Marttila, I., & Heikkinen, H. (2010). High quality factor integrated passive devices for microwave and millimeter wave applications. In Proceedings of 5th ESA Workshop on Millimetre Wave Technology and Applications (pp. 247-251). European Space Agency ESA.