High quality factor integrated passive devices for microwave and millimeter wave applications

Tauno Vähä-Heikkilä, Ilkka Marttila, Hannele Heikkinen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    A fabrication process and multi project wafer run (MPW) service has been developed for realizing integrated passive devices. The fabrication process is simple and low cost ranging applications from consumer electronics to instrumentation and measurement as well as defense and scientific applications. The fabrication process is offered as an MPW service for all types of organizations being suitable for scientific experiments, product prototyping or optimization. The technology has used for realizing microwave and millimeter wave components. Measured result show that the technology as well as accurate design result in loss less than 1.1 dB at 60 GHz for an integrated band-pass filter.
    Original languageEnglish
    Title of host publicationProceedings of 5th ESA Workshop on Millimetre Wave Technology and Applications
    Place of PublicationNoordwijk
    PublisherEuropean Space Agency (ESA)
    Pages247-251
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication
    Event5th ESA Workshop on Millimetre Wave Technology and Applications and 31st ESA Antenna Workshop - ESTEC, Noordwijk, Netherlands
    Duration: 18 May 200920 May 2009

    Conference

    Conference5th ESA Workshop on Millimetre Wave Technology and Applications and 31st ESA Antenna Workshop
    Country/TerritoryNetherlands
    CityNoordwijk
    Period18/05/0920/05/09

    Keywords

    • IPD
    • integrated passive devices
    • filter
    • millimeter wave

    Fingerprint

    Dive into the research topics of 'High quality factor integrated passive devices for microwave and millimeter wave applications'. Together they form a unique fingerprint.

    Cite this