Abstract
A fabrication process and multi project wafer run (MPW) service has been
developed for realizing integrated passive devices. The fabrication process
is simple and low cost ranging applications from consumer electronics to
instrumentation and measurement as well as defense and scientific
applications. The fabrication process is offered as an MPW service for all
types of organizations being suitable for scientific experiments, product
prototyping or optimization. The technology has used for realizing microwave
and millimeter wave components. Measured result show that the technology as
well as accurate design result in loss less than 1.1 dB at 60 GHz for an
integrated band-pass filter.
Original language | English |
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Title of host publication | Proceedings of 5th ESA Workshop on Millimetre Wave Technology and Applications |
Place of Publication | Noordwijk |
Publisher | European Space Agency (ESA) |
Pages | 247-251 |
Publication status | Published - 2010 |
MoE publication type | A4 Article in a conference publication |
Event | 5th ESA Workshop on Millimetre Wave Technology and Applications and 31st ESA Antenna Workshop - ESTEC, Noordwijk, Netherlands Duration: 18 May 2009 → 20 May 2009 |
Conference
Conference | 5th ESA Workshop on Millimetre Wave Technology and Applications and 31st ESA Antenna Workshop |
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Country/Territory | Netherlands |
City | Noordwijk |
Period | 18/05/09 → 20/05/09 |
Keywords
- IPD
- integrated passive devices
- filter
- millimeter wave