Abstract
A fabrication process and multi project wafer run (MPW)
service has been developed for realizing integrated
passive devices. The fabrication process is simple and
low cost ranging applications from consumer electronics
to instrumentation and measurement as well as defense and
scientific applications. The fabrication process is
offered as an MPW service for all types of organizations
being suitable for scientific experiments, product
prototyping or optimization. The technology has used for
realizing microwave and millimeter wave components.
Measured result show that the technology as well as
accurate design result in loss less than 1.1 dB at 60 GHz
for an integrated band-pass filter. (2 refs.)
| Original language | English |
|---|---|
| Title of host publication | Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009 |
| Publisher | International Society for Optics and Photonics SPIE |
| Number of pages | 6 |
| DOIs | |
| Publication status | Published - 2009 |
| MoE publication type | A4 Article in a conference publication |
| Event | Nanosensors, Biosensors, and Info-Tech Sensors and Systems. San Diego, CA, USA, 9 - 11 March 2009 - Duration: 1 Jan 2009 → … |
Publication series
| Series | Proceedings of SPIE |
|---|---|
| Number | 7291 |
| ISSN | 0277-786X |
Conference
| Conference | Nanosensors, Biosensors, and Info-Tech Sensors and Systems. San Diego, CA, USA, 9 - 11 March 2009 |
|---|---|
| Period | 1/01/09 → … |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 9 Industry, Innovation, and Infrastructure
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