High-temperature structural stability of MoSi2-based nanolayer composites

Harriet Kung, Tom Jervis, Juha-Pekka Hirvonen, Terry Mitchell, Michael Nastasi

Research output: Contribution to journalArticle

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)1126-1129
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume13
Issue number3
DOIs
Publication statusPublished - 1995
MoE publication typeA1 Journal article-refereed

Cite this