High-temperature structural stability of MoSi2-based nanolayer composites

Harriet Kung, Tom Jervis, Juha-Pekka Hirvonen, Terry Mitchell, Michael Nastasi

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)1126-1129
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume13
Issue number3
DOIs
Publication statusPublished - 1995
MoE publication typeA1 Journal article-refereed

Cite this

Kung, Harriet ; Jervis, Tom ; Hirvonen, Juha-Pekka ; Mitchell, Terry ; Nastasi, Michael. / High-temperature structural stability of MoSi2-based nanolayer composites. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 1995 ; Vol. 13, No. 3. pp. 1126-1129.
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High-temperature structural stability of MoSi2-based nanolayer composites. / Kung, Harriet; Jervis, Tom; Hirvonen, Juha-Pekka; Mitchell, Terry; Nastasi, Michael.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 13, No. 3, 1995, p. 1126-1129.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - High-temperature structural stability of MoSi2-based nanolayer composites

AU - Kung, Harriet

AU - Jervis, Tom

AU - Hirvonen, Juha-Pekka

AU - Mitchell, Terry

AU - Nastasi, Michael

PY - 1995

Y1 - 1995

U2 - 10.1116/1.588222

DO - 10.1116/1.588222

M3 - Article

VL - 13

SP - 1126

EP - 1129

JO - Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

JF - Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

SN - 2166-2746

IS - 3

ER -