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High-Volume Production and Non-Destructive Piezo-Property Mapping of 33% SC Doped Aluminium Nitride Thin Films
- Stefan Mertin
- , Bernd Heinz
- , Andrea Mazzalar
- , Thorsten Schmitz-Kempen
- , Stephan Tiedke
- , Tuomas Pensala
- Evatec AG
- Aixacct Systems GmbH
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
6
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(Scopus)