High-Volume Production and Non-Destructive Piezo-Property Mapping of 33% SC Doped Aluminium Nitride Thin Films

Stefan Mertin, Bernd Heinz, Andrea Mazzalar, Thorsten Schmitz-Kempen, Stephan Tiedke, Tuomas Pensala

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)

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    Physics & Astronomy