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High-Volume Production and Non-Destructive Piezo-Property Mapping of 33% SC Doped Aluminium Nitride Thin Films

  • Stefan Mertin
  • , Bernd Heinz
  • , Andrea Mazzalar
  • , Thorsten Schmitz-Kempen
  • , Stephan Tiedke
  • , Tuomas Pensala
    • Evatec AG
    • Aixacct Systems GmbH

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    6   Link opens in a new tab Citations (Scopus)

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