| Original language | English |
|---|---|
| Publication status | Published - 2013 |
| MoE publication type | Not Eligible |
| Event | Beneq and ETU Joint ALD Laboratory opening seminar - St. Petersburg, Russian Federation Duration: 15 Nov 2013 → … |
Seminar
| Seminar | Beneq and ETU Joint ALD Laboratory opening seminar |
|---|---|
| Country | Russian Federation |
| City | St. Petersburg |
| Period | 15/11/13 → … |
Cite this
Puurunen, R. (2013). History of ALD: From lab research to industrial applications. Beneq and ETU Joint ALD Laboratory opening seminar, St. Petersburg, Russian Federation.
@conference{a25c82c4764845f982c876c7b4f662d2,
title = "History of ALD: From lab research to industrial applications",
author = "Riikka Puurunen",
note = "Project code: 73742; Beneq and ETU Joint ALD Laboratory opening seminar ; Conference date: 15-11-2013",
year = "2013",
language = "English",
}
Puurunen, R 2013, 'History of ALD: From lab research to industrial applications', Beneq and ETU Joint ALD Laboratory opening seminar, St. Petersburg, Russian Federation, 15/11/13.
History of ALD : From lab research to industrial applications. / Puurunen, Riikka.
2013. Beneq and ETU Joint ALD Laboratory opening seminar, St. Petersburg, Russian Federation.Research output: Contribution to conference › Other conference contribution › Professional
TY - CONF
T1 - History of ALD
T2 - From lab research to industrial applications
AU - Puurunen, Riikka
N1 - Project code: 73742
PY - 2013
Y1 - 2013
UR - https://www.slideshare.net/RiikkaPuurunen/history-of-ald-riikka-puurunen-15112013-final
M3 - Other conference contribution
ER -
Puurunen R. History of ALD: From lab research to industrial applications. 2013. Beneq and ETU Joint ALD Laboratory opening seminar, St. Petersburg, Russian Federation.