History of ALD

From lab research to industrial applications

Riikka Puurunen

Research output: Contribution to conferenceOther conference contributionProfessional

Original languageEnglish
Publication statusPublished - 2013
MoE publication typeNot Eligible
EventBeneq and ETU Joint ALD Laboratory opening seminar - St. Petersburg, Russian Federation
Duration: 15 Nov 2013 → …

Seminar

SeminarBeneq and ETU Joint ALD Laboratory opening seminar
CountryRussian Federation
CitySt. Petersburg
Period15/11/13 → …

Cite this

Puurunen, R. (2013). History of ALD: From lab research to industrial applications. Beneq and ETU Joint ALD Laboratory opening seminar, St. Petersburg, Russian Federation.
Puurunen, Riikka. / History of ALD : From lab research to industrial applications. Beneq and ETU Joint ALD Laboratory opening seminar, St. Petersburg, Russian Federation.
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title = "History of ALD: From lab research to industrial applications",
author = "Riikka Puurunen",
note = "Project code: 73742; Beneq and ETU Joint ALD Laboratory opening seminar ; Conference date: 15-11-2013",
year = "2013",
language = "English",

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Puurunen, R 2013, 'History of ALD: From lab research to industrial applications' Beneq and ETU Joint ALD Laboratory opening seminar, St. Petersburg, Russian Federation, 15/11/13, .

History of ALD : From lab research to industrial applications. / Puurunen, Riikka.

2013. Beneq and ETU Joint ALD Laboratory opening seminar, St. Petersburg, Russian Federation.

Research output: Contribution to conferenceOther conference contributionProfessional

TY - CONF

T1 - History of ALD

T2 - From lab research to industrial applications

AU - Puurunen, Riikka

N1 - Project code: 73742

PY - 2013

Y1 - 2013

UR - https://www.slideshare.net/RiikkaPuurunen/history-of-ald-riikka-puurunen-15112013-final

M3 - Other conference contribution

ER -

Puurunen R. History of ALD: From lab research to industrial applications. 2013. Beneq and ETU Joint ALD Laboratory opening seminar, St. Petersburg, Russian Federation.