History of ALD: From lab research to industrial applications

Riikka Puurunen

Research output: Contribution to conference › Other conference contribution › Professional

Original language	English
Publication status	Published - 2013
MoE publication type	Not Eligible
Event	Beneq and ETU Joint ALD Laboratory opening seminar - St. Petersburg, Russian Federation Duration: 15 Nov 2013 → …

Seminar	Beneq and ETU Joint ALD Laboratory opening seminar
Country	Russian Federation
City	St. Petersburg
Period	15/11/13 → …

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