History of ALD: From lab research to industrial applications

Riikka Puurunen

Research output: Contribution to conference › Other conference contribution › Professional

Original languageEnglish
Publication statusPublished - 2013
MoE publication typeNot Eligible
EventBeneq and ETU Joint ALD Laboratory opening seminar - St. Petersburg, Russian Federation
Duration: 15 Nov 2013 → …

Seminar

SeminarBeneq and ETU Joint ALD Laboratory opening seminar
CountryRussian Federation
CitySt. Petersburg
Period15/11/13 → …

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Cite this

Puurunen, R. (2013). History of ALD: From lab research to industrial applications. Beneq and ETU Joint ALD Laboratory opening seminar, St. Petersburg, Russian Federation.