History of Atomic Layer Deposition: Tutorial at 14th International conference on Atomic Layer Deposition (AVS-ALD 2014, Kyoto, Japan)

Riikka Puurunen

Research output: Contribution to conferenceOther conference contributionScientific

Original languageEnglish
Publication statusPublished - 2014
Event14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan
Duration: 15 Jun 201418 Jun 2014
Conference number: 14

Conference

Conference14th International Conference on Atomic Layer Deposition, ALD 2014
Abbreviated titleALD 2014
CountryJapan
CityKyoto
Period15/06/1418/06/14

Cite this