History of Atomic Layer Deposition

Tutorial at 14th International conference on Atomic Layer Deposition (AVS-ALD 2014, Kyoto, Japan)

Riikka Puurunen

Research output: Contribution to conferenceOther conference contributionScientific

Original languageEnglish
Publication statusPublished - 2014
Event14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan
Duration: 15 Jun 201418 Jun 2014
Conference number: 14

Conference

Conference14th International Conference on Atomic Layer Deposition, ALD 2014
Abbreviated titleALD 2014
CountryJapan
CityKyoto
Period15/06/1418/06/14

Cite this

Puurunen, R. (2014). History of Atomic Layer Deposition: Tutorial at 14th International conference on Atomic Layer Deposition (AVS-ALD 2014, Kyoto, Japan). 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.
Puurunen, Riikka. / History of Atomic Layer Deposition : Tutorial at 14th International conference on Atomic Layer Deposition (AVS-ALD 2014, Kyoto, Japan). 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.
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title = "History of Atomic Layer Deposition: Tutorial at 14th International conference on Atomic Layer Deposition (AVS-ALD 2014, Kyoto, Japan)",
author = "Riikka Puurunen",
note = "Project code: 73742; 14th International Conference on Atomic Layer Deposition, ALD 2014, ALD 2014 ; Conference date: 15-06-2014 Through 18-06-2014",
year = "2014",
language = "English",

}

Puurunen, R 2014, 'History of Atomic Layer Deposition: Tutorial at 14th International conference on Atomic Layer Deposition (AVS-ALD 2014, Kyoto, Japan)' 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan, 15/06/14 - 18/06/14, .

History of Atomic Layer Deposition : Tutorial at 14th International conference on Atomic Layer Deposition (AVS-ALD 2014, Kyoto, Japan). / Puurunen, Riikka.

2014. 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.

Research output: Contribution to conferenceOther conference contributionScientific

TY - CONF

T1 - History of Atomic Layer Deposition

T2 - Tutorial at 14th International conference on Atomic Layer Deposition (AVS-ALD 2014, Kyoto, Japan)

AU - Puurunen, Riikka

N1 - Project code: 73742

PY - 2014

Y1 - 2014

M3 - Other conference contribution

ER -

Puurunen R. History of Atomic Layer Deposition: Tutorial at 14th International conference on Atomic Layer Deposition (AVS-ALD 2014, Kyoto, Japan). 2014. 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.