How conformal is conformal?: Exploring the limits of ALD film conformality with VTT's lateral microscopic PillarHall test structure

Riikka Puurunen

How conformal is conformal? Exploring the limits of ALD film conformality with VTT's lateral microscopic PillarHall test structure

Riikka Puurunen

VTT Technical Research Centre of Finland

Research output: Contribution to conference › Conference article › Scientific

Original language	English
Publication status	Published - 2015
Event	International Workshop Atomic Layer Deposition Russia 2015, ALD Russia 2015 - Moscow-Dolgoprudny, Russian Federation Duration: 21 Sept 2015 → 23 Sept 2015

Workshop

Workshop	International Workshop Atomic Layer Deposition Russia 2015, ALD Russia 2015
Abbreviated title	ALD Russia 2015
Country/Territory	Russian Federation
City	Moscow-Dolgoprudny
Period	21/09/15 → 23/09/15

Cite this

@conference{0e6dc5d1e37e482c9d63cd59d86a4bc8,

title = "How conformal is conformal?: Exploring the limits of ALD film conformality with VTT's lateral microscopic PillarHall test structure",

author = "Riikka Puurunen",

note = "Project code: 102086 ; International Workshop Atomic Layer Deposition Russia 2015, ALD Russia 2015, ALD Russia 2015 ; Conference date: 21-09-2015 Through 23-09-2015",

year = "2015",

language = "English",

}

How conformal is conformal? Exploring the limits of ALD film conformality with VTT's lateral microscopic PillarHall test structure. / Puurunen, Riikka.
2015. Paper presented at International Workshop Atomic Layer Deposition Russia 2015, ALD Russia 2015, Moscow-Dolgoprudny, Russian Federation.

Research output: Contribution to conference › Conference article › Scientific