How conformal is conformal? Exploring the limits of ALD film conformality with VTT's lateral microscopic PillarHall test structure

Riikka Puurunen

Research output: Contribution to conferenceConference articleScientific

Original languageEnglish
Publication statusPublished - 2015
EventInternational Workshop Atomic Layer Deposition Russia 2015, ALD Russia 2015 - Moscow-Dolgoprudny, Russian Federation
Duration: 21 Sep 201523 Sep 2015

Workshop

WorkshopInternational Workshop Atomic Layer Deposition Russia 2015, ALD Russia 2015
Abbreviated titleALD Russia 2015
CountryRussian Federation
CityMoscow-Dolgoprudny
Period21/09/1523/09/15

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