How conformal is conformal? Exploring the limits of ALD film conformality with VTT's lateral microscopic PillarHall test structure

Riikka Puurunen

Research output: Contribution to conferenceConference articleScientific

Original languageEnglish
Publication statusPublished - 2015
EventInternational Workshop Atomic Layer Deposition Russia 2015, ALD Russia 2015 - Moscow-Dolgoprudny, Russian Federation
Duration: 21 Sep 201523 Sep 2015

Workshop

WorkshopInternational Workshop Atomic Layer Deposition Russia 2015, ALD Russia 2015
Abbreviated titleALD Russia 2015
CountryRussian Federation
CityMoscow-Dolgoprudny
Period21/09/1523/09/15

Cite this

Puurunen, R. (2015). How conformal is conformal? Exploring the limits of ALD film conformality with VTT's lateral microscopic PillarHall test structure. Paper presented at International Workshop Atomic Layer Deposition Russia 2015, ALD Russia 2015, Moscow-Dolgoprudny, Russian Federation.
Puurunen, Riikka. / How conformal is conformal? Exploring the limits of ALD film conformality with VTT's lateral microscopic PillarHall test structure. Paper presented at International Workshop Atomic Layer Deposition Russia 2015, ALD Russia 2015, Moscow-Dolgoprudny, Russian Federation.
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title = "How conformal is conformal?: Exploring the limits of ALD film conformality with VTT's lateral microscopic PillarHall test structure",
author = "Riikka Puurunen",
note = "Project code: 102086 ; International Workshop Atomic Layer Deposition Russia 2015, ALD Russia 2015, ALD Russia 2015 ; Conference date: 21-09-2015 Through 23-09-2015",
year = "2015",
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Puurunen, R 2015, 'How conformal is conformal? Exploring the limits of ALD film conformality with VTT's lateral microscopic PillarHall test structure' Paper presented at International Workshop Atomic Layer Deposition Russia 2015, ALD Russia 2015, Moscow-Dolgoprudny, Russian Federation, 21/09/15 - 23/09/15, .

How conformal is conformal? Exploring the limits of ALD film conformality with VTT's lateral microscopic PillarHall test structure. / Puurunen, Riikka.

2015. Paper presented at International Workshop Atomic Layer Deposition Russia 2015, ALD Russia 2015, Moscow-Dolgoprudny, Russian Federation.

Research output: Contribution to conferenceConference articleScientific

TY - CONF

T1 - How conformal is conformal?

T2 - Exploring the limits of ALD film conformality with VTT's lateral microscopic PillarHall test structure

AU - Puurunen, Riikka

N1 - Project code: 102086

PY - 2015

Y1 - 2015

M3 - Conference article

ER -

Puurunen R. How conformal is conformal? Exploring the limits of ALD film conformality with VTT's lateral microscopic PillarHall test structure. 2015. Paper presented at International Workshop Atomic Layer Deposition Russia 2015, ALD Russia 2015, Moscow-Dolgoprudny, Russian Federation.