| Original language | English |
|---|---|
| Publication status | Published - 2015 |
| Event | International Workshop Atomic Layer Deposition Russia 2015, ALD Russia 2015 - Moscow-Dolgoprudny, Russian Federation Duration: 21 Sept 2015 → 23 Sept 2015 |
Workshop
| Workshop | International Workshop Atomic Layer Deposition Russia 2015, ALD Russia 2015 |
|---|---|
| Abbreviated title | ALD Russia 2015 |
| Country/Territory | Russian Federation |
| City | Moscow-Dolgoprudny |
| Period | 21/09/15 → 23/09/15 |