Hybrid integrated micromachined receiver for 77 GHz millimeter wave identification systems

Alexandru Müller, Dan Necaliou, Pekka Pursula, Tauno Vähä-Heikkilä, Fabio Giacomocci, Jussi Tuovinen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)


This paper presents the design, fabrication and millimeter wave measurements of a w-band (75-110 GHz) hybrid integrated micromachined receiver, an integrated double-folded slot antenna has been manufactured using silicon micromachining techniques. The receiver includes a flip chipped diode, which is used as a detector and modulator to demonstrate a millimeter wave identification (MMID) system, the experimental 77 GHz results show, that backscattering based communication used in radio frequency identification (RFID is feasible also in the millimeter wave frequency range.
Original languageEnglish
Title of host publicationThe 37th European Microwave Conference 2007. Munich, Germany, Oct. 2007
Publication statusPublished - 2007
MoE publication typeA4 Article in a conference publication
Event37th European Microwave Conference 2007 - Munich, Germany
Duration: 8 Oct 200712 Oct 2007


Conference37th European Microwave Conference 2007

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