Hybrid layered polymer slot waveguide Young interferometer

Leila Ahmadi, Marianne Hiltunen, Petri Stenberg, Jussi Hiltunen, Sanna Aikio, Matthieu Roussey, Jyrki Saarinen, Seppo Honkanen

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)


We demonstrate a polymer slot waveguide Young interferometer coated with a bilayer of Al2O3/TiO2. The approach enables relaxed dimensions of the polymer waveguide which simplifies the fabrication of the structure with a resolution of 50 nm. The layers were coated by an atomic layer deposition technique. The feasibility of the device was investigated by exploiting the interferometric structure as a bulk refractive index sensor operating at 975 nm wavelength for detection of an ethanol-water solution. A refractive index change of 1 * 10-6 RIU with a sensing length of only 800 µm was detected. The approach confirms the possibility of realizing a low cost device with a small footprint and enhanced sensitivity by employing the TiO2 rails in the sides of the slot waveguide.
Original languageEnglish
Pages (from-to)10275-10285
JournalOptics Express
Issue number10
Publication statusPublished - 2016
MoE publication typeA1 Journal article-refereed

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    Ahmadi, L., Hiltunen, M., Stenberg, P., Hiltunen, J., Aikio, S., Roussey, M., Saarinen, J., & Honkanen, S. (2016). Hybrid layered polymer slot waveguide Young interferometer. Optics Express, 24(10), 10275-10285. https://doi.org/10.1364/OE.24.010275