Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol-gel relief on a metal backbone

A. Schleunitz; C. Spreu; Tapio Mäkelä; Tomi Haatainen; A. Klukowska; H. Schift

doi:10.1016/j.mee.2011.02.019

Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol-gel relief on a metal backbone

A. Schleunitz (Corresponding Author), C. Spreu, Tapio Mäkelä, Tomi Haatainen, A. Klukowska, H. Schift

Research output: Contribution to journal › Article › Scientific › peer-review

31 Citations (Scopus)

Abstract

A straight-forward fabrication process was developed for hybrid layered molds consisting of a flexible metal plate as a mechanical support covered with a sol–gel layer with a nanostructured surface relief. The bendable stamp was tested under high speed roll-to-roll (R2R) manufacturing condition. A sufficient stamp lifetime was found, since no structural degradation was observed after a continuous imprint of more than 40 m. Thus, it is shown that hybrid molds are good and inexpensive alternatives to electroplated shims usually used in R2R embossing.

Original language	English
Pages (from-to)	2113-2116
Number of pages	4
Journal	Microelectronic Engineering
Volume	88
Issue number	8
DOIs	https://doi.org/10.1016/j.mee.2011.02.019
Publication status	Published - 2011
MoE publication type	A1 Journal article-refereed
Event	36th International Conference on Micro- and Nano-Engineering, MNE 2010 - Genoa, Italy Duration: 19 Sept 2010 → 22 Sept 2010

Keywords

Nanoimprint lithography
Roll embossing
Stamp fabrication
Hybrid mold
Sol-gel material
Hybrid polymer

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10.1016/j.mee.2011.02.019

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title = "Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol-gel relief on a metal backbone",

abstract = "A straight-forward fabrication process was developed for hybrid layered molds consisting of a flexible metal plate as a mechanical support covered with a sol–gel layer with a nanostructured surface relief. The bendable stamp was tested under high speed roll-to-roll (R2R) manufacturing condition. A sufficient stamp lifetime was found, since no structural degradation was observed after a continuous imprint of more than 40 m. Thus, it is shown that hybrid molds are good and inexpensive alternatives to electroplated shims usually used in R2R embossing.",

keywords = "Nanoimprint lithography, Roll embossing, Stamp fabrication, Hybrid mold, Sol-gel material, Hybrid polymer",

author = "A. Schleunitz and C. Spreu and Tapio M{\"a}kel{\"a} and Tomi Haatainen and A. Klukowska and H. Schift",

year = "2011",

doi = "10.1016/j.mee.2011.02.019",

language = "English",

volume = "88",

pages = "2113--2116",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

number = "8",

note = "36th International Conference on Micro- and Nano-Engineering, MNE 2010, MNE 2010 ; Conference date: 19-09-2010 Through 22-09-2010",

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TY - JOUR

T1 - Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol-gel relief on a metal backbone

AU - Schleunitz, A.

AU - Spreu, C.

AU - Mäkelä, Tapio

AU - Haatainen, Tomi

AU - Klukowska, A.

AU - Schift, H.

PY - 2011

Y1 - 2011

N2 - A straight-forward fabrication process was developed for hybrid layered molds consisting of a flexible metal plate as a mechanical support covered with a sol–gel layer with a nanostructured surface relief. The bendable stamp was tested under high speed roll-to-roll (R2R) manufacturing condition. A sufficient stamp lifetime was found, since no structural degradation was observed after a continuous imprint of more than 40 m. Thus, it is shown that hybrid molds are good and inexpensive alternatives to electroplated shims usually used in R2R embossing.

AB - A straight-forward fabrication process was developed for hybrid layered molds consisting of a flexible metal plate as a mechanical support covered with a sol–gel layer with a nanostructured surface relief. The bendable stamp was tested under high speed roll-to-roll (R2R) manufacturing condition. A sufficient stamp lifetime was found, since no structural degradation was observed after a continuous imprint of more than 40 m. Thus, it is shown that hybrid molds are good and inexpensive alternatives to electroplated shims usually used in R2R embossing.

KW - Nanoimprint lithography

KW - Roll embossing

KW - Stamp fabrication

KW - Hybrid mold

KW - Sol-gel material

KW - Hybrid polymer

U2 - 10.1016/j.mee.2011.02.019

DO - 10.1016/j.mee.2011.02.019

M3 - Article

SN - 0167-9317

VL - 88

SP - 2113

EP - 2116

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 8

T2 - 36th International Conference on Micro- and Nano-Engineering, MNE 2010

Y2 - 19 September 2010 through 22 September 2010

ER -

Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol-gel relief on a metal backbone

Abstract

Keywords

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