Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol-gel relief on a metal backbone

A. Schleunitz (Corresponding Author), C. Spreu, Tapio Mäkelä, Tomi Haatainen, A. Klukowska, H. Schift

Research output: Contribution to journalArticleScientificpeer-review

25 Citations (Scopus)

Abstract

A straight-forward fabrication process was developed for hybrid layered molds consisting of a flexible metal plate as a mechanical support covered with a sol–gel layer with a nanostructured surface relief. The bendable stamp was tested under high speed roll-to-roll (R2R) manufacturing condition. A sufficient stamp lifetime was found, since no structural degradation was observed after a continuous imprint of more than 40 m. Thus, it is shown that hybrid molds are good and inexpensive alternatives to electroplated shims usually used in R2R embossing.
Original languageEnglish
Pages (from-to)2113-2116
Number of pages4
JournalMicroelectronic Engineering
Volume88
Issue number8
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed
Event36th International Conference on Micro- and Nano-Engineering, MNE 2010 - Genoa, Italy
Duration: 19 Sep 201022 Sep 2010

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Keywords

  • Nanoimprint lithography
  • Roll embossing
  • Stamp fabrication
  • Hybrid mold
  • Sol-gel material
  • Hybrid polymer

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