Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol-gel relief on a metal backbone

A. Schleunitz (Corresponding Author), C. Spreu, Tapio Mäkelä, Tomi Haatainen, A. Klukowska, H. Schift

    Research output: Contribution to journalArticleScientificpeer-review

    27 Citations (Scopus)

    Abstract

    A straight-forward fabrication process was developed for hybrid layered molds consisting of a flexible metal plate as a mechanical support covered with a sol–gel layer with a nanostructured surface relief. The bendable stamp was tested under high speed roll-to-roll (R2R) manufacturing condition. A sufficient stamp lifetime was found, since no structural degradation was observed after a continuous imprint of more than 40 m. Thus, it is shown that hybrid molds are good and inexpensive alternatives to electroplated shims usually used in R2R embossing.
    Original languageEnglish
    Pages (from-to)2113-2116
    Number of pages4
    JournalMicroelectronic Engineering
    Volume88
    Issue number8
    DOIs
    Publication statusPublished - 2011
    MoE publication typeA1 Journal article-refereed
    Event36th International Conference on Micro- and Nano-Engineering, MNE 2010 - Genoa, Italy
    Duration: 19 Sep 201022 Sep 2010

    Keywords

    • Nanoimprint lithography
    • Roll embossing
    • Stamp fabrication
    • Hybrid mold
    • Sol-gel material
    • Hybrid polymer

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