Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol-gel relief on a metal backbone

A. Schleunitz (Corresponding Author), C. Spreu, Tapio Mäkelä, Tomi Haatainen, A. Klukowska, H. Schift

Research output: Contribution to journalArticleScientificpeer-review

24 Citations (Scopus)

Abstract

A straight-forward fabrication process was developed for hybrid layered molds consisting of a flexible metal plate as a mechanical support covered with a sol–gel layer with a nanostructured surface relief. The bendable stamp was tested under high speed roll-to-roll (R2R) manufacturing condition. A sufficient stamp lifetime was found, since no structural degradation was observed after a continuous imprint of more than 40 m. Thus, it is shown that hybrid molds are good and inexpensive alternatives to electroplated shims usually used in R2R embossing.
Original languageEnglish
Pages (from-to)2113-2116
Number of pages4
JournalMicroelectronic Engineering
Volume88
Issue number8
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed
Event36th International Conference on Micro- and Nano-Engineering, MNE 2010 - Genoa, Italy
Duration: 19 Sep 201022 Sep 2010

Fingerprint

Molds
Sol-gels
Metals
high speed
gels
Shims
embossing
Plate metal
metal plates
metals
manufacturing
degradation
Fabrication
Degradation
life (durability)
fabrication

Keywords

  • Nanoimprint lithography
  • Roll embossing
  • Stamp fabrication
  • Hybrid mold
  • Sol-gel material
  • Hybrid polymer

Cite this

@article{effeff8b94e74b9f944e9690e6a707e3,
title = "Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol-gel relief on a metal backbone",
abstract = "A straight-forward fabrication process was developed for hybrid layered molds consisting of a flexible metal plate as a mechanical support covered with a sol–gel layer with a nanostructured surface relief. The bendable stamp was tested under high speed roll-to-roll (R2R) manufacturing condition. A sufficient stamp lifetime was found, since no structural degradation was observed after a continuous imprint of more than 40 m. Thus, it is shown that hybrid molds are good and inexpensive alternatives to electroplated shims usually used in R2R embossing.",
keywords = "Nanoimprint lithography, Roll embossing, Stamp fabrication, Hybrid mold, Sol-gel material, Hybrid polymer",
author = "A. Schleunitz and C. Spreu and Tapio M{\"a}kel{\"a} and Tomi Haatainen and A. Klukowska and H. Schift",
year = "2011",
doi = "10.1016/j.mee.2011.02.019",
language = "English",
volume = "88",
pages = "2113--2116",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier",
number = "8",

}

Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol-gel relief on a metal backbone. / Schleunitz, A. (Corresponding Author); Spreu, C.; Mäkelä, Tapio; Haatainen, Tomi; Klukowska, A.; Schift, H.

In: Microelectronic Engineering, Vol. 88, No. 8, 2011, p. 2113-2116.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol-gel relief on a metal backbone

AU - Schleunitz, A.

AU - Spreu, C.

AU - Mäkelä, Tapio

AU - Haatainen, Tomi

AU - Klukowska, A.

AU - Schift, H.

PY - 2011

Y1 - 2011

N2 - A straight-forward fabrication process was developed for hybrid layered molds consisting of a flexible metal plate as a mechanical support covered with a sol–gel layer with a nanostructured surface relief. The bendable stamp was tested under high speed roll-to-roll (R2R) manufacturing condition. A sufficient stamp lifetime was found, since no structural degradation was observed after a continuous imprint of more than 40 m. Thus, it is shown that hybrid molds are good and inexpensive alternatives to electroplated shims usually used in R2R embossing.

AB - A straight-forward fabrication process was developed for hybrid layered molds consisting of a flexible metal plate as a mechanical support covered with a sol–gel layer with a nanostructured surface relief. The bendable stamp was tested under high speed roll-to-roll (R2R) manufacturing condition. A sufficient stamp lifetime was found, since no structural degradation was observed after a continuous imprint of more than 40 m. Thus, it is shown that hybrid molds are good and inexpensive alternatives to electroplated shims usually used in R2R embossing.

KW - Nanoimprint lithography

KW - Roll embossing

KW - Stamp fabrication

KW - Hybrid mold

KW - Sol-gel material

KW - Hybrid polymer

U2 - 10.1016/j.mee.2011.02.019

DO - 10.1016/j.mee.2011.02.019

M3 - Article

VL - 88

SP - 2113

EP - 2116

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

IS - 8

ER -