@inproceedings{8e78dd3b39894c4eaffd299673b9aacc,
title = "Hybridization, assembling, and testing of miniaturized optoelectronic modules for sensors and microsystems",
abstract = "This paper presents an overview of the research and development work on packaging and manufacturing different optoelectronic modules and microsystems for spectroscopic applications at VTT Electronics. Four different spectrometer concepts are analyzed: a multiwavelength detector module, an LED array spectrometer module, a PGP-spectrograph and an IR-spectrometer on silicon. The construction, main features, packaging concepts and performance are reviewed.",
keywords = "Bolometer, Fabry-Perot interferometer, LED array spectrometer, Multi-channel detector, PGP spectrograph, Surface micromachining",
author = "Harri Kopola and Pentti Karioja and Outi Rusanen and Ari Lehto and Jorma Lammasniemi",
year = "1998",
doi = "10.1117/12.302409",
language = "English",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
pages = "56--64",
editor = "Motamedi, {M. Edward} and Rolf Goering",
booktitle = "Miniaturized Systems with Micro-Optics and Micromechanics III",
address = "United States",
note = "Miniaturized Systems with Micro-Optics and Micromechanics III : Optoelectronics and High-Power Lasers and Applications ; Conference date: 26-01-1998 Through 27-01-1998",
}