Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer

Rami Mannila, Mikko Tuohiniemi, Jussi Mäkynen, Ismo Näkki, Jarkko Antila

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    15 Citations (Scopus)


    VTT Technical Research Centre of Finland has developed microelectromechanical (MEMS) Fabry-Perot interferometer (FPI) for hydrocarbon measurements. Fabry-Perot interferometer is a structure where is two highly reflective surfaces separated by a tunable air gap. The MEMS FPI is a monolithic device, i.e. it is made entirely on one substrate in a batch process, without assembling separate pieces together. The gap is adjusted by moving the upper mirror with electrostatic force, so there are no actual moving parts. The manufactured MEMS FPIs have been characterized. The tuning wavelength range of the MEMS FPI is 2.8-3.5 µm and its spectral resolution is 50-60 nm. VTT has designed and manufactured a handheld size demonstrator device based on the technology presented in this abstract. This device demonstrates gas detecting by measuring cigarette lighter gas and various plastic materials transmission spectra. The demonstrator contains light source, gas cell, MEMS FPI, detector and control electronics. It is connected to a laptop by USB connection, additional power supply or connection is not needed.
    Original languageEnglish
    Title of host publicationNext-Generation Spectroscopic Technologies VI
    EditorsMark A. Druy, Richard A. Crocombe
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)978-0-8194-9517-4
    Publication statusPublished - 2013
    MoE publication typeA4 Article in a conference publication
    EventSPIE Defense, Security, and Sensing - Baltimore, MD, United States
    Duration: 29 Apr 20133 May 2013

    Publication series

    SeriesProceedings of SPIE


    ConferenceSPIE Defense, Security, and Sensing
    Country/TerritoryUnited States
    CityBaltimore, MD


    • Fabry-Perot interferometer
    • gas measurement
    • handheld device
    • hydrocarbon
    • MEMS


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