Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer

Rami Mannila, Mikko Tuohiniemi, Jussi Mäkynen, Ismo Näkki, Jarkko Antila

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

12 Citations (Scopus)

Abstract

VTT Technical Research Centre of Finland has developed microelectromechanical (MEMS) Fabry-Perot interferometer (FPI) for hydrocarbon measurements. Fabry-Perot interferometer is a structure where is two highly reflective surfaces separated by a tunable air gap. The MEMS FPI is a monolithic device, i.e. it is made entirely on one substrate in a batch process, without assembling separate pieces together. The gap is adjusted by moving the upper mirror with electrostatic force, so there are no actual moving parts. The manufactured MEMS FPIs have been characterized. The tuning wavelength range of the MEMS FPI is 2.8-3.5 µm and its spectral resolution is 50-60 nm. VTT has designed and manufactured a handheld size demonstrator device based on the technology presented in this abstract. This device demonstrates gas detecting by measuring cigarette lighter gas and various plastic materials transmission spectra. The demonstrator contains light source, gas cell, MEMS FPI, detector and control electronics. It is connected to a laptop by USB connection, additional power supply or connection is not needed.
Original languageEnglish
Title of host publicationNext-Generation Spectroscopic Technologies VI
EditorsMark A. Druy, Richard A. Crocombe
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-081949517-4
DOIs
Publication statusPublished - 2013
MoE publication typeNot Eligible
EventSPIE Defense, Security, and Sensing - Baltimore, MD, United States
Duration: 29 Apr 20133 May 2013

Publication series

SeriesProceedings of SPIE
Volume8726
ISSN0277-786X

Conference

ConferenceSPIE Defense, Security, and Sensing
CountryUnited States
CityBaltimore, MD
Period29/04/133/05/13

Fingerprint

Fabry-Perot interferometers
microelectromechanical systems
hydrocarbons
gases
electronic control
Finland
assembling
power supplies
spectral resolution
light sources
plastics
tuning
electrostatics
mirrors
air
detectors
cells
wavelengths

Keywords

  • Fabry-Perot interferometer
  • gas measurement
  • handheld device
  • hydrocarbon
  • MEMS

Cite this

Mannila, R., Tuohiniemi, M., Mäkynen, J., Näkki, I., & Antila, J. (2013). Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer. In M. A. Druy, & R. A. Crocombe (Eds.), Next-Generation Spectroscopic Technologies VI [872608] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 8726 https://doi.org/10.1117/12.2016362
Mannila, Rami ; Tuohiniemi, Mikko ; Mäkynen, Jussi ; Näkki, Ismo ; Antila, Jarkko. / Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer. Next-Generation Spectroscopic Technologies VI. editor / Mark A. Druy ; Richard A. Crocombe. International Society for Optics and Photonics SPIE, 2013. (Proceedings of SPIE, Vol. 8726).
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abstract = "VTT Technical Research Centre of Finland has developed microelectromechanical (MEMS) Fabry-Perot interferometer (FPI) for hydrocarbon measurements. Fabry-Perot interferometer is a structure where is two highly reflective surfaces separated by a tunable air gap. The MEMS FPI is a monolithic device, i.e. it is made entirely on one substrate in a batch process, without assembling separate pieces together. The gap is adjusted by moving the upper mirror with electrostatic force, so there are no actual moving parts. The manufactured MEMS FPIs have been characterized. The tuning wavelength range of the MEMS FPI is 2.8-3.5 µm and its spectral resolution is 50-60 nm. VTT has designed and manufactured a handheld size demonstrator device based on the technology presented in this abstract. This device demonstrates gas detecting by measuring cigarette lighter gas and various plastic materials transmission spectra. The demonstrator contains light source, gas cell, MEMS FPI, detector and control electronics. It is connected to a laptop by USB connection, additional power supply or connection is not needed.",
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Mannila, R, Tuohiniemi, M, Mäkynen, J, Näkki, I & Antila, J 2013, Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer. in MA Druy & RA Crocombe (eds), Next-Generation Spectroscopic Technologies VI., 872608, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8726, SPIE Defense, Security, and Sensing, Baltimore, MD, United States, 29/04/13. https://doi.org/10.1117/12.2016362

Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer. / Mannila, Rami; Tuohiniemi, Mikko; Mäkynen, Jussi; Näkki, Ismo; Antila, Jarkko.

Next-Generation Spectroscopic Technologies VI. ed. / Mark A. Druy; Richard A. Crocombe. International Society for Optics and Photonics SPIE, 2013. 872608 (Proceedings of SPIE, Vol. 8726).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AB - VTT Technical Research Centre of Finland has developed microelectromechanical (MEMS) Fabry-Perot interferometer (FPI) for hydrocarbon measurements. Fabry-Perot interferometer is a structure where is two highly reflective surfaces separated by a tunable air gap. The MEMS FPI is a monolithic device, i.e. it is made entirely on one substrate in a batch process, without assembling separate pieces together. The gap is adjusted by moving the upper mirror with electrostatic force, so there are no actual moving parts. The manufactured MEMS FPIs have been characterized. The tuning wavelength range of the MEMS FPI is 2.8-3.5 µm and its spectral resolution is 50-60 nm. VTT has designed and manufactured a handheld size demonstrator device based on the technology presented in this abstract. This device demonstrates gas detecting by measuring cigarette lighter gas and various plastic materials transmission spectra. The demonstrator contains light source, gas cell, MEMS FPI, detector and control electronics. It is connected to a laptop by USB connection, additional power supply or connection is not needed.

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Mannila R, Tuohiniemi M, Mäkynen J, Näkki I, Antila J. Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer. In Druy MA, Crocombe RA, editors, Next-Generation Spectroscopic Technologies VI. International Society for Optics and Photonics SPIE. 2013. 872608. (Proceedings of SPIE, Vol. 8726). https://doi.org/10.1117/12.2016362