Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer

Rami Mannila, Mikko Tuohiniemi, Jussi Mäkynen, Ismo Näkki, Jarkko Antila

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    12 Citations (Scopus)

    Abstract

    VTT Technical Research Centre of Finland has developed microelectromechanical (MEMS) Fabry-Perot interferometer (FPI) for hydrocarbon measurements. Fabry-Perot interferometer is a structure where is two highly reflective surfaces separated by a tunable air gap. The MEMS FPI is a monolithic device, i.e. it is made entirely on one substrate in a batch process, without assembling separate pieces together. The gap is adjusted by moving the upper mirror with electrostatic force, so there are no actual moving parts. The manufactured MEMS FPIs have been characterized. The tuning wavelength range of the MEMS FPI is 2.8-3.5 µm and its spectral resolution is 50-60 nm. VTT has designed and manufactured a handheld size demonstrator device based on the technology presented in this abstract. This device demonstrates gas detecting by measuring cigarette lighter gas and various plastic materials transmission spectra. The demonstrator contains light source, gas cell, MEMS FPI, detector and control electronics. It is connected to a laptop by USB connection, additional power supply or connection is not needed.
    Original languageEnglish
    Title of host publicationNext-Generation Spectroscopic Technologies VI
    EditorsMark A. Druy, Richard A. Crocombe
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)978-081949517-4
    DOIs
    Publication statusPublished - 2013
    MoE publication typeNot Eligible
    EventSPIE Defense, Security, and Sensing - Baltimore, MD, United States
    Duration: 29 Apr 20133 May 2013

    Publication series

    SeriesProceedings of SPIE
    Volume8726
    ISSN0277-786X

    Conference

    ConferenceSPIE Defense, Security, and Sensing
    CountryUnited States
    CityBaltimore, MD
    Period29/04/133/05/13

    Fingerprint

    Fabry-Perot interferometers
    microelectromechanical systems
    hydrocarbons
    gases
    electronic control
    Finland
    assembling
    power supplies
    spectral resolution
    light sources
    plastics
    tuning
    electrostatics
    mirrors
    air
    detectors
    cells
    wavelengths

    Keywords

    • Fabry-Perot interferometer
    • gas measurement
    • handheld device
    • hydrocarbon
    • MEMS

    Cite this

    Mannila, R., Tuohiniemi, M., Mäkynen, J., Näkki, I., & Antila, J. (2013). Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer. In M. A. Druy, & R. A. Crocombe (Eds.), Next-Generation Spectroscopic Technologies VI [872608] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 8726 https://doi.org/10.1117/12.2016362
    Mannila, Rami ; Tuohiniemi, Mikko ; Mäkynen, Jussi ; Näkki, Ismo ; Antila, Jarkko. / Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer. Next-Generation Spectroscopic Technologies VI. editor / Mark A. Druy ; Richard A. Crocombe. International Society for Optics and Photonics SPIE, 2013. (Proceedings of SPIE, Vol. 8726).
    @inproceedings{25c81184a5c2405ab27caebe627333f4,
    title = "Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer",
    abstract = "VTT Technical Research Centre of Finland has developed microelectromechanical (MEMS) Fabry-Perot interferometer (FPI) for hydrocarbon measurements. Fabry-Perot interferometer is a structure where is two highly reflective surfaces separated by a tunable air gap. The MEMS FPI is a monolithic device, i.e. it is made entirely on one substrate in a batch process, without assembling separate pieces together. The gap is adjusted by moving the upper mirror with electrostatic force, so there are no actual moving parts. The manufactured MEMS FPIs have been characterized. The tuning wavelength range of the MEMS FPI is 2.8-3.5 µm and its spectral resolution is 50-60 nm. VTT has designed and manufactured a handheld size demonstrator device based on the technology presented in this abstract. This device demonstrates gas detecting by measuring cigarette lighter gas and various plastic materials transmission spectra. The demonstrator contains light source, gas cell, MEMS FPI, detector and control electronics. It is connected to a laptop by USB connection, additional power supply or connection is not needed.",
    keywords = "Fabry-Perot interferometer, gas measurement, handheld device, hydrocarbon, MEMS",
    author = "Rami Mannila and Mikko Tuohiniemi and Jussi M{\"a}kynen and Ismo N{\"a}kki and Jarkko Antila",
    year = "2013",
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    Mannila, R, Tuohiniemi, M, Mäkynen, J, Näkki, I & Antila, J 2013, Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer. in MA Druy & RA Crocombe (eds), Next-Generation Spectroscopic Technologies VI., 872608, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8726, SPIE Defense, Security, and Sensing, Baltimore, MD, United States, 29/04/13. https://doi.org/10.1117/12.2016362

    Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer. / Mannila, Rami; Tuohiniemi, Mikko; Mäkynen, Jussi; Näkki, Ismo; Antila, Jarkko.

    Next-Generation Spectroscopic Technologies VI. ed. / Mark A. Druy; Richard A. Crocombe. International Society for Optics and Photonics SPIE, 2013. 872608 (Proceedings of SPIE, Vol. 8726).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    AB - VTT Technical Research Centre of Finland has developed microelectromechanical (MEMS) Fabry-Perot interferometer (FPI) for hydrocarbon measurements. Fabry-Perot interferometer is a structure where is two highly reflective surfaces separated by a tunable air gap. The MEMS FPI is a monolithic device, i.e. it is made entirely on one substrate in a batch process, without assembling separate pieces together. The gap is adjusted by moving the upper mirror with electrostatic force, so there are no actual moving parts. The manufactured MEMS FPIs have been characterized. The tuning wavelength range of the MEMS FPI is 2.8-3.5 µm and its spectral resolution is 50-60 nm. VTT has designed and manufactured a handheld size demonstrator device based on the technology presented in this abstract. This device demonstrates gas detecting by measuring cigarette lighter gas and various plastic materials transmission spectra. The demonstrator contains light source, gas cell, MEMS FPI, detector and control electronics. It is connected to a laptop by USB connection, additional power supply or connection is not needed.

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    Mannila R, Tuohiniemi M, Mäkynen J, Näkki I, Antila J. Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer. In Druy MA, Crocombe RA, editors, Next-Generation Spectroscopic Technologies VI. International Society for Optics and Photonics SPIE. 2013. 872608. (Proceedings of SPIE, Vol. 8726). https://doi.org/10.1117/12.2016362