Hydrogen in diamond-like carbon films

E. Vainonen-Ahlgren, P. Tikkanen (Corresponding Author), Jari Likonen, Esko Rauhala, J. Keinonen

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)


    Properties of physical vapor deposited diamond-like carbon films and the migration of hydrogen in co-deposited samples were studied. Measurements utilizing Rutherford backscattering spectrometry and Doppler-shift-attenuation techniques were used to obtain the average mass density of the films. Distributions of co-deposited hydrogen and deuterium were measured by the nuclear resonance reaction 1H (15N,αγ)12C, and the elastic recoil detection technique, respectively. Secondary ion mass spectrometry was also used in combination with these two methods. It was observed that in H and CH4 co-deposited DLC films the temperature of H release varied between 950 and 1070°C depending on the H concentration.
    Original languageEnglish
    Pages (from-to)975-979
    Number of pages5
    JournalJournal of Nuclear Materials
    Publication statusPublished - 1999
    MoE publication typeA1 Journal article-refereed


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