Hydrogen in diamond-like carbon films

E. Vainonen-Ahlgren, P. Tikkanen (Corresponding Author), Jari Likonen, Esko Rauhala, J. Keinonen

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)

Abstract

Properties of physical vapor deposited diamond-like carbon films and the migration of hydrogen in co-deposited samples were studied. Measurements utilizing Rutherford backscattering spectrometry and Doppler-shift-attenuation techniques were used to obtain the average mass density of the films. Distributions of co-deposited hydrogen and deuterium were measured by the nuclear resonance reaction 1H (15N,αγ)12C, and the elastic recoil detection technique, respectively. Secondary ion mass spectrometry was also used in combination with these two methods. It was observed that in H and CH4 co-deposited DLC films the temperature of H release varied between 950 and 1070°C depending on the H concentration.
Original languageEnglish
Pages (from-to)975-979
Number of pages5
JournalJournal of Nuclear Materials
Volume266-269
DOIs
Publication statusPublished - 1999
MoE publication typeA1 Journal article-refereed

Fingerprint

Diamond like carbon films
Hydrogen
diamonds
Deuterium
carbon
Doppler effect
Rutherford backscattering spectroscopy
hydrogen
Secondary ion mass spectrometry
Spectrometry
Vapors
secondary ion mass spectrometry
deuterium
backscattering
attenuation
vapors
shift
Temperature
spectroscopy
temperature

Cite this

Vainonen-Ahlgren, E., Tikkanen, P., Likonen, J., Rauhala, E., & Keinonen, J. (1999). Hydrogen in diamond-like carbon films. Journal of Nuclear Materials, 266-269, 975-979. https://doi.org/10.1016/S0022-3115(98)00682-5
Vainonen-Ahlgren, E. ; Tikkanen, P. ; Likonen, Jari ; Rauhala, Esko ; Keinonen, J. / Hydrogen in diamond-like carbon films. In: Journal of Nuclear Materials. 1999 ; Vol. 266-269. pp. 975-979.
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Vainonen-Ahlgren, E, Tikkanen, P, Likonen, J, Rauhala, E & Keinonen, J 1999, 'Hydrogen in diamond-like carbon films', Journal of Nuclear Materials, vol. 266-269, pp. 975-979. https://doi.org/10.1016/S0022-3115(98)00682-5

Hydrogen in diamond-like carbon films. / Vainonen-Ahlgren, E.; Tikkanen, P. (Corresponding Author); Likonen, Jari; Rauhala, Esko; Keinonen, J.

In: Journal of Nuclear Materials, Vol. 266-269, 1999, p. 975-979.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Hydrogen in diamond-like carbon films

AU - Vainonen-Ahlgren, E.

AU - Tikkanen, P.

AU - Likonen, Jari

AU - Rauhala, Esko

AU - Keinonen, J.

PY - 1999

Y1 - 1999

N2 - Properties of physical vapor deposited diamond-like carbon films and the migration of hydrogen in co-deposited samples were studied. Measurements utilizing Rutherford backscattering spectrometry and Doppler-shift-attenuation techniques were used to obtain the average mass density of the films. Distributions of co-deposited hydrogen and deuterium were measured by the nuclear resonance reaction 1H (15N,αγ)12C, and the elastic recoil detection technique, respectively. Secondary ion mass spectrometry was also used in combination with these two methods. It was observed that in H and CH4 co-deposited DLC films the temperature of H release varied between 950 and 1070°C depending on the H concentration.

AB - Properties of physical vapor deposited diamond-like carbon films and the migration of hydrogen in co-deposited samples were studied. Measurements utilizing Rutherford backscattering spectrometry and Doppler-shift-attenuation techniques were used to obtain the average mass density of the films. Distributions of co-deposited hydrogen and deuterium were measured by the nuclear resonance reaction 1H (15N,αγ)12C, and the elastic recoil detection technique, respectively. Secondary ion mass spectrometry was also used in combination with these two methods. It was observed that in H and CH4 co-deposited DLC films the temperature of H release varied between 950 and 1070°C depending on the H concentration.

U2 - 10.1016/S0022-3115(98)00682-5

DO - 10.1016/S0022-3115(98)00682-5

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JO - Journal of Nuclear Materials

JF - Journal of Nuclear Materials

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Vainonen-Ahlgren E, Tikkanen P, Likonen J, Rauhala E, Keinonen J. Hydrogen in diamond-like carbon films. Journal of Nuclear Materials. 1999;266-269:975-979. https://doi.org/10.1016/S0022-3115(98)00682-5