Hydrogen migration in diamond-like carbon films

E. Vainonen, Jari Likonen, T. Ahlgren, P. Haussalo, J. Keinonen

Research output: Contribution to journalArticleScientificpeer-review

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Abstract

Properties of physical vapor deposited diamondlike carbon (DLC) films and the migration of hydrogen in H+ and 4He+ ion implanted and hydrogen co-deposited DLC films have been studied. Measurements utilizing Rutherford backscattering spectrometry showed that the films studied have an average mass density of 2.6±0.1 g/cm3. The bonding ratio sp3/sp2 is typically 70% measured with the electron spectroscopy for chemical analysis technique. Impurities and their depth distributions were deduced from the particle induced x-ray emission and secondary ion mass spectrometry (SIMS) measurements. Distributions of implanted and co-deposited hydrogen were measured by the nuclear resonance reaction 1H(15N,αγ)12C and SIMS. It was found that annealing behavior of implanted H in DLC has a diffusion like character. The obtained diffusion coefficients resulted in the activation energy of 2.0±0.1 eV. It was observed that in H co-deposited DLC films the temperature of H release varied between 950 and 1070 °C depending on the H concentration.
Original languageEnglish
Pages (from-to)3791-3796
Number of pages6
JournalJournal of Applied Physics
Volume82
Issue number8
DOIs
Publication statusPublished - 1997
MoE publication typeA1 Journal article-refereed

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diamonds
carbon
hydrogen
secondary ion mass spectrometry
chemical analysis
electron spectroscopy
backscattering
diffusion coefficient
vapors
activation energy
impurities
annealing
spectroscopy
ions
x rays
temperature

Cite this

Vainonen, E., Likonen, J., Ahlgren, T., Haussalo, P., & Keinonen, J. (1997). Hydrogen migration in diamond-like carbon films. Journal of Applied Physics, 82(8), 3791-3796. https://doi.org/10.1063/1.365741
Vainonen, E. ; Likonen, Jari ; Ahlgren, T. ; Haussalo, P. ; Keinonen, J. / Hydrogen migration in diamond-like carbon films. In: Journal of Applied Physics. 1997 ; Vol. 82, No. 8. pp. 3791-3796.
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abstract = "Properties of physical vapor deposited diamondlike carbon (DLC) films and the migration of hydrogen in H+ and 4He+ ion implanted and hydrogen co-deposited DLC films have been studied. Measurements utilizing Rutherford backscattering spectrometry showed that the films studied have an average mass density of 2.6±0.1 g/cm3. The bonding ratio sp3/sp2 is typically 70{\%} measured with the electron spectroscopy for chemical analysis technique. Impurities and their depth distributions were deduced from the particle induced x-ray emission and secondary ion mass spectrometry (SIMS) measurements. Distributions of implanted and co-deposited hydrogen were measured by the nuclear resonance reaction 1H(15N,αγ)12C and SIMS. It was found that annealing behavior of implanted H in DLC has a diffusion like character. The obtained diffusion coefficients resulted in the activation energy of 2.0±0.1 eV. It was observed that in H co-deposited DLC films the temperature of H release varied between 950 and 1070 °C depending on the H concentration.",
author = "E. Vainonen and Jari Likonen and T. Ahlgren and P. Haussalo and J. Keinonen",
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Vainonen, E, Likonen, J, Ahlgren, T, Haussalo, P & Keinonen, J 1997, 'Hydrogen migration in diamond-like carbon films', Journal of Applied Physics, vol. 82, no. 8, pp. 3791-3796. https://doi.org/10.1063/1.365741

Hydrogen migration in diamond-like carbon films. / Vainonen, E.; Likonen, Jari; Ahlgren, T.; Haussalo, P.; Keinonen, J.

In: Journal of Applied Physics, Vol. 82, No. 8, 1997, p. 3791-3796.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Hydrogen migration in diamond-like carbon films

AU - Vainonen, E.

AU - Likonen, Jari

AU - Ahlgren, T.

AU - Haussalo, P.

AU - Keinonen, J.

N1 - Project code: KET41461

PY - 1997

Y1 - 1997

N2 - Properties of physical vapor deposited diamondlike carbon (DLC) films and the migration of hydrogen in H+ and 4He+ ion implanted and hydrogen co-deposited DLC films have been studied. Measurements utilizing Rutherford backscattering spectrometry showed that the films studied have an average mass density of 2.6±0.1 g/cm3. The bonding ratio sp3/sp2 is typically 70% measured with the electron spectroscopy for chemical analysis technique. Impurities and their depth distributions were deduced from the particle induced x-ray emission and secondary ion mass spectrometry (SIMS) measurements. Distributions of implanted and co-deposited hydrogen were measured by the nuclear resonance reaction 1H(15N,αγ)12C and SIMS. It was found that annealing behavior of implanted H in DLC has a diffusion like character. The obtained diffusion coefficients resulted in the activation energy of 2.0±0.1 eV. It was observed that in H co-deposited DLC films the temperature of H release varied between 950 and 1070 °C depending on the H concentration.

AB - Properties of physical vapor deposited diamondlike carbon (DLC) films and the migration of hydrogen in H+ and 4He+ ion implanted and hydrogen co-deposited DLC films have been studied. Measurements utilizing Rutherford backscattering spectrometry showed that the films studied have an average mass density of 2.6±0.1 g/cm3. The bonding ratio sp3/sp2 is typically 70% measured with the electron spectroscopy for chemical analysis technique. Impurities and their depth distributions were deduced from the particle induced x-ray emission and secondary ion mass spectrometry (SIMS) measurements. Distributions of implanted and co-deposited hydrogen were measured by the nuclear resonance reaction 1H(15N,αγ)12C and SIMS. It was found that annealing behavior of implanted H in DLC has a diffusion like character. The obtained diffusion coefficients resulted in the activation energy of 2.0±0.1 eV. It was observed that in H co-deposited DLC films the temperature of H release varied between 950 and 1070 °C depending on the H concentration.

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DO - 10.1063/1.365741

M3 - Article

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