Abstract
Diffusion of As into Ge from a GaAs overlayer deposited on p-type Ge substrates has been studied by means of secondary ion mass spectrometry. A concentration-dependent diffusion of As atoms was observed in addition to the concentration-independent diffusion of Ga and As atoms. The concentration dependence is explained by a Fermi-level-dependent diffusion model. Arsenic atoms are shown to diffuse through Ge vacancies with the charge states 2− and 0. No presence of the singly negatively charged vacancies was observed, indicating that Ge vacancy could be a negative U center.
Original language | English |
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Pages (from-to) | 690 - 692 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 77 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2000 |
MoE publication type | A1 Journal article-refereed |