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Idenfication of vacancy charge states in diffusion of arsenic in germanium

  • E. Vainonen-Ahlgren
  • , T. Ahlgren*
  • , Jari Likonen
  • , S. Lehto
  • , J. Keinonen
  • , W. Li
  • , J. Haapamaa
  • *Corresponding author for this work
    • University of Helsinki
    • VTT (former employee or external)
    • Tampere University of Technology (TUT)

    Research output: Contribution to journalArticleScientificpeer-review

    Abstract

    Diffusion of As into Ge from a GaAs overlayer deposited on p-type Ge substrates has been studied by means of secondary ion mass spectrometry. A concentration-dependent diffusion of As atoms was observed in addition to the concentration-independent diffusion of Ga and As atoms. The concentration dependence is explained by a Fermi-level-dependent diffusion model. Arsenic atoms are shown to diffuse through Ge vacancies with the charge states 2− and 0. No presence of the singly negatively charged vacancies was observed, indicating that Ge vacancy could be a negative U center.
    Original languageEnglish
    Pages (from-to)690 - 692
    Number of pages3
    JournalApplied Physics Letters
    Volume77
    Issue number5
    DOIs
    Publication statusPublished - 2000
    MoE publication typeA1 Journal article-refereed

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