III-V compounds for semiconductor technology

Ilkka Suni

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationFirst Symposium on Atomic Layer Epitaxy
Place of PublicationEspoo
PublisherVTT Technical Research Centre of Finland
Pages27-31
ISBN (Print)951-38-2200-1
Publication statusPublished - 1984
MoE publication typeA4 Article in a conference publication
EventFirst Symposium on Atomic Layer Epitaxy - Espoo, Finland
Duration: 13 Dec 198414 Dec 1984

Publication series

SeriesVTT Symposium
Number54
ISSN0357-9387

Conference

ConferenceFirst Symposium on Atomic Layer Epitaxy
CountryFinland
CityEspoo
Period13/12/8414/12/84

Cite this

Suni, I. (1984). III-V compounds for semiconductor technology. In First Symposium on Atomic Layer Epitaxy (pp. 27-31). Espoo: VTT Technical Research Centre of Finland. VTT Symposium, No. 54
Suni, Ilkka. / III-V compounds for semiconductor technology. First Symposium on Atomic Layer Epitaxy. Espoo : VTT Technical Research Centre of Finland, 1984. pp. 27-31 (VTT Symposium; No. 54).
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title = "III-V compounds for semiconductor technology",
author = "Ilkka Suni",
year = "1984",
language = "English",
isbn = "951-38-2200-1",
series = "VTT Symposium",
publisher = "VTT Technical Research Centre of Finland",
number = "54",
pages = "27--31",
booktitle = "First Symposium on Atomic Layer Epitaxy",
address = "Finland",

}

Suni, I 1984, III-V compounds for semiconductor technology. in First Symposium on Atomic Layer Epitaxy. VTT Technical Research Centre of Finland, Espoo, VTT Symposium, no. 54, pp. 27-31, First Symposium on Atomic Layer Epitaxy, Espoo, Finland, 13/12/84.

III-V compounds for semiconductor technology. / Suni, Ilkka.

First Symposium on Atomic Layer Epitaxy. Espoo : VTT Technical Research Centre of Finland, 1984. p. 27-31 (VTT Symposium; No. 54).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - III-V compounds for semiconductor technology

AU - Suni, Ilkka

PY - 1984

Y1 - 1984

M3 - Conference article in proceedings

SN - 951-38-2200-1

T3 - VTT Symposium

SP - 27

EP - 31

BT - First Symposium on Atomic Layer Epitaxy

PB - VTT Technical Research Centre of Finland

CY - Espoo

ER -

Suni I. III-V compounds for semiconductor technology. In First Symposium on Atomic Layer Epitaxy. Espoo: VTT Technical Research Centre of Finland. 1984. p. 27-31. (VTT Symposium; No. 54).